音圈电机直驱气浮升降平台的设计及其性能测试  

Design and Performance Testing of Voice Coil Motor Direct-Driven Aerostatic Lifting Platform

作　　者：谢靖 尹自强 曾俊[1,2] 詹金章 XIE Jing;YIN Ziqiang;ZENG Jun;ZHAN Jinzhang(State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment,Guangdong University of Technology,Guangzhou 510006,China;School of Electromechanical Engineering,Guangdong University of Technology,Guangzhou 510006,China)

机构地区：[1]广东工业大学省部共建精密电子制造技术与装备国家重点实验室,广州510006 [2]广东工业大学机电工程学院,广州510006

出　　处：《组合机床与自动化加工技术》2024年第11期56-60,67,共6页Modular Machine Tool & Automatic Manufacturing Technique

基　　金：国家自然科学基金项目(51575520);2022年揭阳市科技创新发展专项(重大专项)项目(DZX098)。

摘　　要：在半导体的精密加工与精密测量中,针对一些光路限制、加工设备固定的情况下,设计了一种音圈电机直驱的气浮升降平台,承载起工件进行精密定位。平台的驱动元件采用两个高精度、高频率、无摩擦的音圈电机进行驱动,平衡元件采用了低摩擦气浮气缸进行平衡运动部件的重力,导向元件采用了多孔式节流的环绕式气体静压导轨进行导向,同时反馈元件采用高精度光栅尺作为实时反馈装置。对气体静压导轨进行了气体理论分析,用Ansys仿真软件进行导轨承载力和刚度的仿真,并结合实验进行验证仿真分析。考虑到两个音圈电机驱动时的机械耦合作用,采用了主令并行交叉耦合控制算法,来对升降平台进行精密控制。最后对升降平台的定位精度、俯仰误差、偏摆误差、直线度进行了性能测试,证明了该升降平台具备了精密加工与精密测量的能力。In the precision processing and precision measurement of semiconductors,in view of some optical path restrictions and fixed processing equipment,thepaper proposes a voice coil motor direct-driven aerostatic lifting platform to carry the workpiece for precise positioning.The driving element of the platform uses two high-precision,high-frequency,frictionless voice coil motors,the balance element uses a low-friction air-floating cylinder to balance the gravity of the moving parts,the guide element uses a porous aerostatic guideway for guidance,and the feedback element uses a high-precision grating ruler as a real-time feedback device.This paper conducts a gas theory analysis of theaerostatic guideway,uses Ansys software to simulate the bearing capacity and stiffness of the guideway,and verifies the simulation analysis through experiments.Considering the mechanical coupling effect when driving the two voice coil motors,a master parallel cross-coupling control algorithm is used to precisely control the lifting platform.Finally,the performance test was conducted on the positioning accuracy,pitch error,yaw error,and straightness of the lifting platform,which proved that the lifting platform has the capability of precision processing and precision measurement.

关 键 词：升降平台 气体静压导轨 多孔质石墨 刚度 交叉耦合 

分 类 号：TH165[机械工程—机械制造及自动化] TG659[金属学及工艺—金属切削加工及机床]