电容式三维力柔性触觉传感器设计与应用研究  

Design and application of capacitivethree-dimensional force flexible tactile sensor

作　　者：许德成[1] 王浩楠 冯雁来 林禄朋 范宇航 XU De-cheng;WANG Hao-nan;FENG Yan-lai;LIN Lu-peng;FAN Yu-hang(College of Information and Technology,Jilin Normal University,Siping 136000,China;Baicheng Radio&Television Station,Baicheng 137000,China)

机构地区：[1]吉林师范大学信息技术学院,吉林四平136000 [2]白城广播电视台,吉林白城137000

出　　处：《吉林师范大学学报（自然科学版）》2024年第4期76-82,共7页Journal of Jilin Normal University:Natural Science Edition

基　　金：吉林省教育厅科学技术研究项目(JJKH20230514CY)。

摘　　要：设计并制作了一种基于电容式传感器原理的可检测三维力的电容式柔性三维力传感器.实验证明该传感器可用于人体运动的检测.阐述了此传感器的工作原理、基本结构,并运用COMSOL有限元仿真软件对该传感器进行结构验证.该传感器的柔性基体材料由硅胶构成,上下柔性电极层由有机硅导电银胶构成.此传感器的响应时间最低可达12.5 ms,法向力在0~3 N检测范围内的灵敏度为1.036 N^(-1),切向力在0~3 N范围内的灵敏度为0.446 N^(-1).实验结果表明该传感器拥有良好的灵敏度和可重复性、结构简单、造价低廉、制作过程简洁等优点,为柔性三维力传感器的研究提供了一种新的方案.A capacitive flexible three-dimensional force sensor which could detect three-dimensional force based on the principle of capacitive sensor was presented.And the sensor could be used to detect human motion from the experimental results.The working principle and basic structure of the sensor were described and the structure of the sensor was verified by COMSOL finite element simulation software.The flexible matrix material of the sensor was composed of silicone rubber,and the upper and lower flexible electrode layer was composed of organosilicon conductive silver glue.The response time of the sensor is as low as 12.5 ms.The sensitivity of normal force in the detection range of 0 N to 3 N is 1.036 N^(-1),and the sensitivity of tangential force is 0.446 N^(-1) in the range of 0 N to 3 N.The results show that the sensor has the advantages of good sensitivity,repeatability,simple structure,low cost and simple fabrication process,which provides a new scheme for the research of flexible three-dimensional force sensor.

关 键 词：全柔性传感器 电容式 三维力 硅胶 有机硅导电银胶 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]