量子点电容气敏效应研究及其传感器芯片设计  

Gas-senstive effect research of quantum dot capacitor and design of sensor chip

作　　者：胡志响 唐艳婷 张文键 周伯文 李华曜[1] 刘欢[1] HU Zhixiang;TANG Yanting;ZHANG Wenjian;ZHOU Bowen;LI Huayao;LIU Huan(School of Integrated Circuits,Wuhan National Laboratory for Optoelectronics,Optics Valley Laboratory,Huazhong University of Science and Technology,Wuhan 430074,China)

机构地区：[1]华中科技大学集成电路学院武汉光电国家研究中心湖北光谷实验室,湖北武汉430074

出　　处：《传感器与微系统》2024年第12期117-121,共5页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(61922032,62271222,61904062);湖北省自然科学基金资助项目(2022CFA035)。

摘　　要：量子点具有晶粒尺寸小、比表面积大、表面活性位点多的特点,是低维气敏材料领域的研究前沿。然而,受量子限域效应的制约,量子点薄膜电阻通常较高,影响气体传感器的实用性。本文以硫化铅量子点室温气敏材料为研究对象,在陶瓷衬底上制备出量子点薄膜,分别对其薄膜电阻与电容的气敏效应进行了测试与分析。研究结果表明:量子点薄膜电容同样具有室温二氧化氮(NO_(2))气敏效应。以此为基础,提出融合量子点电容气敏效应与晶体管原理的新型气体传感器芯片结构,将量子点薄膜平面电容通过串联的方式形成气敏栅并进行仿真分析,利用量子点薄膜电容随气体发生变化的敏感效应,将气—固界面的化学作用转换为晶体管沟道电流信号,具有高灵敏度、低功耗、高集成度的特点。研究结果可为实现半导体气体传感器芯片设计和晶圆级制造提供参考。Quantum dots featured by their small grain size,large specific surface area,and abundant surface active sites are the research frontier in the field of low-dimensional gas-sensitive materials.However,suffer from restriction of the quantum confinement effect,resistance of quantum dot thin films is usually high,practicality of gas sensors is often affected.Gas sensing material of lead sulfide quantum dots are taken as the research object at room temperature,and thin-film of quantum dots is prepared on ceramic substrate.The gas-sensitive effect of the thin-film resistor and capacitor are tested and analyzed,respectively.The research results show that the quantum dot thin-film capacitor also has gas sensitive effect to NO_(2) at room temperature.Based on this,a novel gas sensor chip structure is proposed,which fuses gas senstive effect of quantum dot capacitor with the transistor principle.Then,the planar capacitor of the quantum dot film is connected in series to form a gas-sensitive gate and is conducted simulation analysis.By utilizing the sensitive effect of quantum dot thin film capacitance changes with gas,the chemical interaction at the gas-solid interface can be converted into transistor channel current signals.This method has the features of high sensitivity,low power consumption,and high integration.The research results can provide a reference for the chips design and wafer-level manufacturing of semiconductor gas sensor.

关 键 词：半导体气体传感器 场效应晶体管 电容 仿真 敏感机理 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]