电磁MEMS-VCSELs微结构的仿真与分析  

Simulation and analysis of electromagnetic MEMS-VCSELs micro-structure

作　　者：廖启超 孙涛 姜楠 关宝璐 何凯旋 LIAO Qichao;SUN Tao;JIANG Nan;GUAN Baolu;HE Kaixuan(School of Microelectronics,Faculty of Information Science,Beijing University of Technology,Beijing 100124,China;Anhui North Microelectronics Research Institute Group,Bengbu 233000,China)

机构地区：[1]北京工业大学信息学部微电子学院,北京100124 [2]安徽北方微电子研究院集团有限公司,安徽蚌埠233000

出　　处：《传感器与微系统》2024年第12期155-159,164,共6页Transducer and Microsystem Technologies

摘　　要：提出了一种电磁驱动式VCSELs阵列与MEMS微镜集成化的MEMS-VCSELs微结构,给出了圆角矩形线圈的布线规则,并利用格林定理求解等温线性雷诺方程后,建立了带有金属线圈和VCSELs的活动平板的转动惯量、阻尼系数等参量的理论模型。使用Auto CAD及COMSOL软件搭建了有限元模型,考虑了微结构各模块的组合特性以及磁力矩的效用特性。通过添加材料固体力学相关要素进行了稳态和频域下的状态模拟,探究了微结构的静态扭转、谐振模态、谐响应以及扭转应力等扭转特性。结果表明:边界载荷作用下微结构的最大静态机械扭转角度达到3.02°;在一阶模态作为工作模态时,其谐振频率为1.313 kHz,谐振状态机械扭转角度可达42°,并与其余临近高阶模态相对独立。通过提取静态和谐振态下扭转梁表面中心线的应力分布,其最大应力值小于硅基直扭转梁的安全应力,微结构可靠性良好。An electromagnetic-driven MEMS-VCSELs microstructure that integrates VCSEL arrays with MEMS micro-mirrors is presented.Wiring rules for rounded rectangular coils are provided,and Green’s Theorem is used to solve the isothermal linear Reynolds equation.The theoretical model is established for the moment of inertia,damping coefficient,and other parameters of the moving plate with metal coils and VCSELs.Finite element model is built using Auto CAD and COMSOL software,considering the combined characteristics of each module in the microstructure and the effect of magnetic torque.Torsion characteristic of static torsion,resonant modes,harmonic response,and torsional stress of the microstructure are simulated in steady-state and frequency domains by adding material solid mechanics-related elements.The results show that the maximum static mechanical torsion angle of the microstructure under boundary loading is 3.02°.When the first-order mode is used as the working mode,the resonant frequency is 1.313 kHz,and the mechanical torsion angle in the resonant state can reach 42°,which is relatively independent of the adjacent higher-order modes.By extracting the stress distribution of the centerline of the torsion beam surface in the static and resonant states,the maximum stress value is less than the safe stress of a silicon-based straight torsion beam,indicating that the microstructure has good reliability.

关 键 词：MEMS-垂直腔面微结构 MEMS微镜 激光雷达 有限元仿真 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]