MEMS石英振梁加速度计低噪声驱动系统构建研究  

Research on the Construction of Low Noise Driving Circuit for MEMS Quartz Vibrating Beam Accelerometer

作　　者：郑德智 许宁 王一霖 胡纯 ZHENG Dezhi;XU Ning;WANG Yilin;HU Chun(Advanced Research Institute of Multidisciplinary Sciences,Beijing Institute of Technology,Beijing 100081;MIIT Key Laboratory of Complex-field Intelligent Exploration,Beijing Institute of Technology,Beijing 100081;Yangtze Delta Region Academy of Beijing Institute of Technology,Jiaxing 314019;Faculty of Information Technology,Beijing University of Technology,Beijing 100124)

机构地区：[1]北京理工大学前沿交叉科学研究院,北京100081 [2]北京理工大学复杂环境智能感测技术工信部重点实验室,北京100081 [3]北京理工大学长三角研究院嘉兴,嘉兴314019 [4]北京工业大学信息学部,北京100124

出　　处：《导航与控制》2024年第3期13-19,96,共8页Navigation and Control

基　　金：国家重点研发计划(编号:2021YFB3201502)。

摘　　要：驱动电路是石英振梁加速度计的重要组成部分,直接决定加速度计的性能。针对传统石英振梁驱动电路输出波形单一、噪声控制效果较差的问题,使用等效电路法对石英振梁进行理论和仿真分析,并使用阻抗分析仪测得了石英振梁的阻抗特性。以此为基础,设计了一种输出高质量正弦波的石英振梁加速度计低噪声驱动电路。该电路使用电荷放大器电路实现对石英振梁电流的低噪声检测,引入了静态电容补偿电路提升电路性能。实验结果表明,本驱动电路可正常驱动石英振梁,输出为标准正弦波。白噪声的频谱密度约为140μHz/Hz^(1/2),依据配套加速度计80 Hz/g的标度因数,等效的加速度分辨率为1.75μg/Hz^(1/2),证明了理论分析和电路设计的合理性。The performance of quartz vibrating beam accelerometers is directly related to the performance of the driving circuit,so it is necessary to study how to improve the performance of the driving circuit.In this paper,the electrical characteristics of quartz vibrating beams is analyzed through theoretical,simulation,and experimental measurements.Based on this,a low-noise driving circuit for a quartz vibrating beam accelerometer with high-quality sine wave output is designed.This circuit uses a charge amplifier circuit to achieve low noise detection of quartz beam current,and introduces a static capacitance compensation circuit to improve circuit performance.The experimental results show that this driving circuit can drive the quartz vibrating beam normally,and the output is a standard sine wave without significant distortion.The spectral density of white noise is approximately 140μHz/Hz^(1/2),based on the scaling factor of the matching accelerometer 80 Hz/g,the equivalent acceleration resolution is 1.75μg/Hz^(1/2),which proves the rationality of theoretical analysis and circuit design.

关 键 词：惯性传感器 石英振梁 驱动电路 电路噪声 

分 类 号：TP24[自动化与计算机技术—检测技术与自动化装置]