MEMS石英振梁加速度计数据采集与精度补偿系统设计  

Design of Data Acquisition and Accuracy Compensation System for MEMS Quartz Vibrating Beam Accelerometer

作　　者：李波[1] 焦舰 董鑫宇 李村[1] 白冰 LI Bo;JIAO Jian;DONG Xinyu;LI Cun;BAI Bing(State Key Laboratory for Manufacturing Systems Engineering,Xi’an Jiaotong University,Xi’an 710049;Shanghai Inertial Engineering Technology Research Center,Shanghai Academy of Spaceflight Technology,Shanghai 201109)

机构地区：[1]西安交通大学精密微纳测试技术全国重点实验室,西安710049 [2]上海航天控制技术研究所上海惯性工程技术研究中心,上海201109

出　　处：《导航与控制》2024年第3期34-46,共13页Navigation and Control

基　　金：国家重点研发计划(编号:2021YFB3201500);上海航天科技创新基金(编号:SAST2023-056)。

摘　　要：温度是影响石英振梁加速度计精度和稳定性的主要因素之一,工作环境温度的变化会引起加速度计精度和稳定性降低。为了提升加速度计在变温环境下的精度保持能量,可通过温度补偿技术降低由温度引起的加速度计漂移。为了实现MEMS石英振梁加速度计的实时精度补偿,需同步采集加速度计的频率和温度数据。针对MEMS石英振梁加速度计数据采集和精度补偿系统需求,基于FPGA的并行时序处理优势和嵌入式SOPC系统强大运算和数据处理能力,开发了测频测温IP核,实现了加速度计频率数据的采集和温度补偿。通过系统内部嵌入的温度补偿算法模型,完成加速度计实时在线温度补偿。并通过实验验证了温度补偿系统的数据采集功能和精度,结果表明,所研发的数据采集与精度补偿系统能够实现频率和温度数据的采集,测频精度优于10^(-6),系统中嵌入的温度补偿算法模型可实现加速度计精度的实时在线补偿。Temperature is one of the main factors affecting the accuracy and stability of quartz vibrating beam accelerometer,and the change of working environment temperature will cause the accuracy and stability of the accelerometer to decrease.In order to improve the accuracy of the accelerometer in a variable temperature environment,temperature-compensated technology can be used to reduce temperature-induced accelerometer drift.In order to realize the real-time accuracy compensation of MEMS quartz vibrating beam accelerometer,the frequency and temperature data of the accelerometer need to be collected simultaneously.In this paper,based on the advantages of FPGA parallel timing processing and the powerful computing and data processing capabilities of the embedded SOPC system,a frequency and temperature measurement IP core is developed to realize the acquisition and temperature compensation of accelerometer frequency data based on the data acquisition and accuracy compensation system requirements of MEMS quartz vibrating beam accelerometer.Through the temperature compensation algorithm model embedded in the system,the real-time online temperature compensation of the accelerometer is completed.The results show that the data acquisition and accuracy compensation system developed in this paper can realize the acquisition of frequency and temperature data,and the frequency measurement accuracy is better than 10^(-6),and the temperature compensation algorithm model embedded in the system can realize the real-time online compensation of accelerometer accuracy.

关 键 词：MEMS加速度计 测频系统 数据采集 温度补偿 

分 类 号：TP24[自动化与计算机技术—检测技术与自动化装置]