基于TDLAS技术的HF气体检测技术研究  

Research on HF Gas Detection Technology Based on TDLAS Technology

作　　者：陈淼 刘章进 李橙橙 唐伟 Chen Miao;Liu Zhangjin;Li Chengcheng;Tang Wei(Hu'nan Wuling Electric Power Technology Co.,Ltd.,Hu'nan,410000)

机构地区：[1]湖南五凌电力科技有限公司,湖南410000

出　　处：《当代化工研究》2024年第21期79-81,共3页Modern Chemical Research

摘　　要：氟化氢(HF)气体是一种有毒有害的气体,具有非常强的吸湿性,可以无限溶于水,从而形成具有强腐蚀性的氢氟酸。现有的HF气体检测方法,在实际使用中存在响应速度慢、检测精度低、易受温度和湿度等环境因素的影响。对比国内外先进的检测方法,提出近红外TDLAS(可调谐半导体激光吸收光谱)检测的技术方案。分析待测气体最强吸收谱线,吸收光程和电路信噪比对精度的影响,优化设计系统,提出HF气体检测系统解决方案,实现HF气体测量。数据分析表明,HF检测下限达到0.01μL/L。Hydrogen Fluoride(HF)gas is a kind of toxic and harmful gas.Under normal conditions,it is a colorless and irritating toxic gas with very strong hydrophilicity.It can be infinitely miscible with water to form hydrofluoric acid,which is highly corrosive.Existing detection tech-nologies have slow response speed,low detection accuracy,and are vulnerable to environmental factors such as temperature and humidity.Compares the advanced detection methods at home and abroad,and puts forward the technical scheme of near-infrared TDLAS technology detection.Analyze the influence of the strongest absorption spectrum line of the gas to be measured,the absorption optical path and the accuracy of the signal-to-noise ratio of the circuit,optimize the design of the system,and propose the solution of the HF gas detection system to realize the HF gas measurement.Data analysis shows that the lower limit of HF detection reaches 0.01μL/L.

关 键 词：HF TDLAS 数字锁相 长光程怀特池 微弱信号处理 

分 类 号：O657.33[理学—分析化学]