大角度线性偏转的电热式微镜仿真设计  

Simulation Design of Electrothermal Micro Mirror with Large Angle Linear Deflection

作　　者：和学泰 祝方舟 邵光笑 李庆党 HE Xuetai;ZHU Fangzhou;SHAO Guangxiao;LI Qingdang(School of Mechanical and Electrical Engineering,Qingdao University of Science and Technology,Qingdao 266100;Sino-German Institute of Economic Engineering,Qingdao University of Science and Technology,Qingdao 266100)

机构地区：[1]青岛科技大学机电工程学院,青岛266100 [2]青岛科技大学中德科技学院,青岛266100

出　　处：《计算机与数字工程》2024年第10期2932-2936,2954,共6页Computer & Digital Engineering

摘　　要：MEMS微镜虽种类繁多,但是能够实现大角度偏转能力的MEMS微镜却很少,能够实现线性偏转能力的MEMS微镜更是屈指可数。论文针对现有MEMS微镜偏转角度小、偏转能力不可控以及无法线性偏转等问题,提出了一种新型的电热式MEMS微镜结构,该结构具备较大的微镜反射平面,并且镜面平整光滑,反射率较高。不仅能够实现119°的大角度偏转能力,还具有在0~3 V内的电压—角度线性偏转的能力。Although there are many kinds of MEMS micromirrors,there are few MEMS micromirrors that can realize large an-gle deflection,and there are few MEMS micromirrors that can realize linear deflection.In this paper,aiming at the problems of small deflection angle,uncontrollable deflection ability and inability of linear deflection of the existing MEMS micro mirror,a new electrothermal MEMS micro mirror structure is proposed.The structure has a large micro mirror reflection plane,flat and smooth mirror and high reflectivity.It can not only realize 119°large angle deflection,but also has the ability of voltage angle linear deflec-tion within 0~3 V.

关 键 词：微光机电系统 电热式微镜仿真 线性偏转MEMS微镜 大角度偏转微镜 

分 类 号：TN491[电子电信—微电子学与固体电子学]