半绝缘砷化镓光电导天线的封装优化  

Encapsulation Optimization for Photoconductive Antennas Based on Semi-Insulating GaAs

作　　者：张梓桐 王天一 郭宇飞 李金 江添翼 王建波 齐志强 王晨晟[1] Zhang Zitong;Wang Tianyi;Guo Yufei;Li Jin;Jiang Tianyi;Wang Jianbo;Qi Zhiqiang;Wang Chensheng(Huazhong Institute of Electro-Optics,Wuhan National Laboratory for Optoelectronics,Wuhan 430223,Hubei,China;Daheng New Epoch Technology,Inc.,Beijing 100085,China)

机构地区：[1]华中光电技术研究所武汉光电国家研究中心,湖北武汉430223 [2]大恒新纪元科技股份有限公司,北京100085

出　　处：《激光与光电子学进展》2024年第19期257-262,共6页Laser & Optoelectronics Progress

摘　　要：针对光电导天线(PCA)芯片目前普遍面临太赫兹发射功率较低的问题,利用Si3N4和硅凝胶对PCA芯片进行钝化和封装,并利用太赫兹时域光谱(THz-TDS)系统测量其太赫兹波形。实验结果表明:1)Si3N4钝化层的引入可以将无激光照射下的器件电阻增大约一个数量级、将太赫兹波幅值提高至约为原来的6倍以及将在大气环境下探测到的太赫兹谱宽从1.5 THz扩展至约3.0 THz;2)硅凝胶能对激光起到会聚或发散作用,同时也可以将器件耐压性提高至少为原来的1.4倍,进而将太赫兹波幅值提升至原来的1.5倍。Considering the low-terahertz transmission power of typical photoconductive antenna(PCA)chips,this study uses Si3N4 and silicone gel to passivate and package PCA chips and uses a terahertz time-domain spectroscopy(THz-TDS)system to measure the terahertz waveform.The experiments show that:1)Si3N4 passivation increases the device resistance without laser illumination by approximately an order of magnitude,enhances the terahertz pulse amplitude sixfold,and extends the terahertz spectral width detected in an atmospheric environment from 1.5 THz to approximately 3.0 THz;2)silicone gel converges or diverges the pump laser beam and improved the dielectric strength of the device at least by 1.4 times,thus enhancing the pulse amplitude by 1.5 times.

关 键 词：太赫兹脉冲 光电导天线 太赫兹时域光谱 欧姆接触 绝缘封装 

分 类 号：O434.3[机械工程—光学工程]