高精度宽量程MEMS皮拉尼真空度传感器  

High-Accuracy Wide-Range MEMS Pirani Vacuum Sensor

作　　者：乔靖评 焦斌斌[1] 刘瑞文[1] 孔延梅[1] 云世昌 赵成圆 刘鑫 叶雨欣[1] 杜向斌 余立航 贾士奇 王子龙 李思博 Qiao Jingping;Jiao Binbin;Liu Ruiwen;Kong Yanmei;Yun Shichang;Zhao Chengyuan;Liu Xin;Ye Yuxin;Du Xiangbin;Yu Lihang;Jia Shiqi;Wang Zilong;Li Sibo(Microsystems Technology Laboratory,New Technology Development Department,Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;School of Integrated Circuits,University of Chinese Academy of Sciences,Beijing 101408,China;Zhengzhou Zhongke Institute of Integrated Circuits and System Applications,Zhengzhou 450001,China)

机构地区：[1]中国科学院微电子研究所新技术开发部微系统技术实验室,北京100029 [2]中国科学院大学集成电路学院,北京101408 [3]郑州中科集成电路与系统应用研究院,郑州450001

出　　处：《微纳电子技术》2024年第12期81-89,共9页Micronanoelectronic Technology

基　　金：国家重点研发计划(2022YFB3205803)。

摘　　要：真空度传感器是真空检测的核心元件。基于全桥结构微电子机械系统(MEMS)皮拉尼芯片开发了一款高精度宽量程MEMS皮拉尼真空度传感器。全桥结构的设计从芯片级有效抑制了传感器的温漂。测试结果表明,传感器最大温漂为0.15%/℃。校准后,该传感器能够在5×10^(-2)~1.01×10^(5)Pa的真空度范围内实现小于5%的高读数精度,最大灵敏度为1.34 V/Dec。传感器平均噪声小于-100 dB,理论计算最小检测极限为1.9×10^(-3)Pa。该真空度传感器具有宽量程和高检测精度的特点,能够满足不同领域的真空检测需求。Vacuum sensor is the core component for vacuum detection.A high-accuracy widerange microelectromechanical system(MEMS)Pirani vacuum sensor was developed based on a full-bridge structure MEMS Pirani chip.The temperature drift of the sensor is effectively suppressed from the chip level via the design of the full-bridge structure.Measurement results show that the maximum temperature drift of the sensor is 0.15%/℃.After calibration,the sensor is able to achieve a high reading accuracy of less than 5%in a vacuum range of 5×10^(-2)-1.01×10^(5)Pa,and with a maximum sensitivity of 1.34 V/Dec.The average sensor noise is less than-100 dB,and the theoretically calculated minimum detection limit is 1.9×10^(-3)Pa.The reported vacuum sensor features wide-range and high detection accuracy,which can meet the vacuum detection needs in different fields.

关 键 词：微电子机械系统(MEMS) 皮拉尼真空度传感器 硅丝式 高精度 宽量程 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH823[自动化与计算机技术—控制科学与工程]