基于氧化钒薄膜的双层红外焦平面阵列的设计与仿真  

Design and Simulation of Double Layers Infrared Focal Plane Arrays Based on Vanadium Oxide Films

作　　者：行琳 王晗 王如志[1,2] XING Lin;WANG Han;WANG Ruzhi(College of Materials Science and Engineering,Beijing University of Technology,Beijing 100124,China;Key Laboratory of Novel Functional Materials,Ministry of Education,Beijing 100124,China)

机构地区：[1]北京工业大学材料科学与工程学院,北京100124 [2]新型功能材料教育部重点实验室,北京100124

出　　处：《有色金属工程》2024年第11期58-65,共8页Nonferrous Metals Engineering

基　　金：广东省重点领域研发计划项目(2024B0101080002)。

摘　　要：随着红外探测器对高灵敏度、快速响应、低成本等性能要求日益增加,新型非制冷型微测辐射热计引起了人们极大关注与兴趣。设计了双层伞状镂空吸收层的微测辐射热计单元结构,对不同结构的性能进行了仿真分析。研究了吸收层厚度和面积对红外吸收率、热时间常数以及电压响应率的影响。结果表明,70 nm厚度的双层伞状结构吸收层红外吸收率达82.5%以上。优化后的设计模型,吸收层面积106.4μm 2、厚度70 nm,其响应时间为0.54 ms,展现出快速响应和高稳定性。电学仿真结果表明,在2μA偏置电流下,该结构具备7.384×10^(-8) W/K的有效热导率和2.461×10^(5) V/W的响应率,适用于制备高性能快速响应非制冷红外焦平面探测器,为非制冷红外探测器的制备和电路设计提供了可行的理论指导。With the increasing requirements of infrared detectors for high sensitivity,fast response,low cost and other performance parameters,the new uncooled microbolometer has attracted great attention and interest.In this paper,a micro-radiometric thermopile unit structure with a bilayer umbrella-shaped hollow absorption layer was designed,and the performances of different structures was analysed by simulation.The effects of the thickness and area of the absorber layer on the infrared absorption rate,thermal time constant and voltage response rate were investigated.The results show that the infrared absorption rate of the absorbing layer of the bilayer umbrella structure with a thickness of 70 nm exceeds 82.5%.The response time of the optimized design model with an absorbing layer area of 106.4μm^(2) and a thickness of 70 nm,with a response time of 0.54 ms,demonstrating fast response and high stability.Electrical simulation results show that the structure possesses an effective thermal conductivity of 7.384×10^(-8) W/K and a response rate of 2.461×10^(5) V/W under a bias current of 2μA,which is suitable for preparing high-performance fast-response uncooled infrared focal-plane detectors and provides a good solution for the preparation and circuit design of uncooled infrared detectors.This provides feasible theoretical guidance for the preparation and circuit design of uncooled infrared detectors.

关 键 词：微测辐射热计 氧化钒 非制冷红外探测 有限元仿真 

分 类 号：TN215[电子电信—物理电子学] TB34[一般工业技术—材料科学与工程]