电子束品质评价方法综述  

Review of electron beam quality evaluation methods

作　　者：史丽娜 王鹏飞 刘俊标[1,2] 邓晨晖 殷伯华 韩立[1,2] SHI Lina;WANG Pengfei;LIU Junbiao;DENG Chenhui;YIN Bohua;HAN Li(Institute of Electrical Engineering,Chinese Academy of Sciences,Beijing 100190;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院电工研究所,北京100190 [2]中国科学院大学,北京100049

出　　处：《电子显微学报》2024年第6期733-743,共11页Journal of Chinese Electron Microscopy Society

基　　金：中国科学院科研仪器设备研制项目(No.GJJSTD20200004);广东省重点领域研发计划项目(No.2020B0101320002);中国科学院电工研究所科研基金(No.E155440101)。

摘　　要：电子显微类仪器广泛应用于微纳观测与精密加工领域,属于高端科学仪器。如何有效评价电子束品质是仪器开发者与使用者所关心的问题。然而,电子显微类仪器种类众多,根据应用的不同,电子束品质评价方法也有很大差异。因此,建立规范化的电子束评价方法,客观、准确和方便地评价电子束品质,是电子显微类仪器研制和应用方面的重要内容。本文基于电子显微类仪器中电子束性质,针对束流、束斑、束流密度和电子枪亮度等电子束品质参数,其中将束流和束斑定义作为直接评价参数,束流密度和电子枪亮度作为基本评价参数,分析了电子束评价参数不同测试方法的特点,从而对各种电子束评价方法进行分类归纳比较,同时将电子光学传递函数作为一种综合评价方法进行了总结分析。本文基于上述内容,可为建立规范化的电子束品质评价标准和测试方法提供参考依据。Electron microscopy instruments are essential high-end scientific tools used for micro-nano observation and precision processing.Evaluating the quality of electron beams is a critical concern for both instrument developers and users.With the variety of electron microscopy instruments available,evaluation method for electron beam quality can differ significantly depending on the applications.Thus,establishing a standardized method for evaluating electron beam quality is critical for the development and application of electron microscopy instruments.In this paper,we analyzed electron beam quality parameters such as beam current,beam spot,beam density,and electron gun brightness.We categorized beam current and beam spot as direct evaluation parameters,while beam density and electron gun brightness are defined as the basic evaluation parameters.We reviewed the characteristics of different test method for these parameters,generalizing and comparing different evaluation method.Additionally,we summarized and analyzed the electron optical transfer function as a comprehensive evaluation method.This paper aims to provide a reference for establishing standardized evaluation standards and testing method of electron beam quality.

关 键 词：电子显微类仪器 电子束品质 评价参数 测试方法 

分 类 号：TN16[电子电信—物理电子学]