金刚石涂层表面纳秒激光加工直槽微织构工艺研究  

Research on the Process of Nanosecond Laser Machining of Straight Groove Microtextures on Diamond-Coated Surfaces

作　　者：谢佳平 丁帅 付依依 邓晓帆 XIE Jia-ping;DING Shuai;FU Yi-yi;DENG Xiao-fan(School of Mechanical Engineering,Tianjin University of Technology and Education,Tianjin 300222,China;Tianjin TANHAS Technology Co.,Ltd,Tianjin 300222,China;Tianjin Tiansen Intelligent Equipment Co.,Ltd,Tianjin 300222,China)

机构地区：[1]天津职业技术师范大学机械工程学院,天津300222 [2]天津天海同步科技有限公司,天津300222 [3]天津市天森智能设备有限公司,天津300222

出　　处：《机械研究与应用》2024年第6期1-4,共4页Mechanical Research & Application

基　　金：天津市研究生科研创新项目:面向触觉感知的柔性电阻式传感器开发(编号:2022SKYZ016)。

摘　　要：为探究紫外纳秒激光在金刚石涂层表面加工微织构时对织构尺寸的影响规律,并选取出能够在金刚石涂层表面加工出较好质量微织构的激光加工参数,文章基于单因素实验,利用纳秒激光设备在金刚石涂层表面进行不同加工功率、加工速度和加工次数的微织构实验。实验结果表明,紫外纳秒激光加工功率、加工速度和加工次数对织构的尺寸和质量有极其重要的影响,织构的宽度和深度以及热影响区域的大小随激光加工功率的增加而增大,随加工速度的增大而减小;当加工次数在一定数值范围内,宽度和深度随加工次数的增加而增大;但当超过该数值范围,织构深度和宽度随加工次数增大而增大的趋势减缓。基于单因素实验结果发现,选择加工功率为8.3 W、加工速度为80 mm/s、加工次数为5次时,金刚石涂层表面加工的织构尺寸较大、质量较好、热影响区较小。所研究内容可为纳秒激光加工金刚石涂层表面织构的参数选择提供理论指导。To investigate the influence of ultraviolet nanosecond laser processing on the microtexture dimensions of diamond-coated surfaces and to select the laser processing parameters that could produce high-quality microtextures,in this study,based on the single-factor experiments,the microtexture experiments were performed on diamond-coated surfaces with varying processing power,processing speed and number of passes by using the nanosecond laser equipment.The experimental results indicate that ultraviolet nanosecond laser processing power,speed,and number of passes significantly affect the texture dimensions and quality.The width,depth and heat-affected zone(HAZ)of the textures increase with higher laser processing power but decrease with the increased processing speed.Within a certain range of passes,the width and depth of the textures increase with the number of passes;however,beyond this range,the rate of increase in texture depth and width slows down.Based on the single-factor experiment results,it is found that selecting a processing power of 8.3 W,a processing speed of 80 mm/s,and five passes yields larger texture dimensions,better quality,and a smaller HAZ on the diamond-coated surfaces.This study provides theoretical guidance for parameter selection in nanosecond laser processing of textures on diamond-coated surfaces.

关 键 词：纳秒激光 金刚石涂层 微织构 

分 类 号：P619.241[天文地球—矿床学]