基于双层三维太赫兹超材料的多功能传感器  

Dual-layer 3D terahertz metamaterial based multifunctional sensor

作　　者：邓光晟[1,2] 郭澳然 程新奇 杨军[1,2] 蔡斐[1] Deng Guangsheng;Guo Aoran;Cheng Xinqi;Yang Jun;Cai Fei(Special Display and Imaging Technology Innovation Center of Anhui Province,Academy of Opto-Electronic Technology,Hefei University of Technology,Hefei,Anhui 230009,China;Anhui Province Key Laboratory of Measuring Theory and Precision Instrument,School of Instrument Science and Optoelectronics Engineering,Hefei University of Technology,Hefei,Anhui 230009,China)

机构地区：[1]合肥工业大学光电技术研究院,特种显示与成像技术安徽省技术创新中心,安徽合肥230009 [2]合肥工业大学仪器科学与光电工程学院,测量理论与精密仪器安徽省重点实验室,安徽合肥230009

出　　处：《光电工程》2024年第10期41-48,共8页Opto-Electronic Engineering

基　　金：国家重点研发计划资助项目(2023YFF0719403);国家自然科学基金资助项目(62001150);安徽省自然科学基金资助项目(2208085MF160)。

摘　　要：传感器作为集成化器件中至关重要的部分,其多功能性越来越受到重视。本文介绍了一种基于双层三维谐振结构耦合的太赫兹超材料多功能传感器。传感装置包括上下两层聚酰亚胺薄膜基底,附着在下层聚酰亚胺薄膜基底上的石墨层,以及在石墨层和上层聚酰亚胺薄膜基底之间的周期性双层三维齿形耦合谐振结构,此结构包括下层对称山形结构和上层对称凹形结构。该三维超材料结合多层结构可实现多功能测量:可通过谐振频率确定待测液体介质层的折射率变化,从而实现液体成分的高精度分辨;在一维方向的微位移传感方面,则可分别在z轴方向以及y轴方向上实现微位移的高灵敏度测量。本文所提出的三维超材料传感器能为功能集成化传感在太赫兹领域的应用提供了新的思路。The versatility of sensors,as a crucial part of integrated devices,is receiving increasing attention.Here,a terahertz metamaterial multifunctional sensor based on the coupling of a two-layer 3D resonant structure is introduced.The sensor consists of an upper and lower polyimide film substrate,a graphite layer attached to the lower polyimide film substrate,and a periodic double-layer 3D toothed coupling resonant structure between the graphite layer and the upper polyimide film substrate,which consists of a symmetric mountain-shaped structure in the lower layer and a symmetric concave structure in the upper layer.The three-dimensional metamaterial can achieve multifunctional measurements:the refractive index change of the liquid medium can be detected with high sensitivity by measuring the resonant frequency of the structure.Therefore,it is possible to detect the liquid medium with such a design.Meanwhile,in terms of micro displacement sensing,a high micro displacement measurement sensitivity can be realized in both the z-axis and y-axis directions,respectively.The 3D metamaterial sensor proposed in this paper provides an idea for the design of a functionally integrated sensor in the terahertz region.

关 键 词：三维超材料 多功能测量 折射率 微位移 

分 类 号：TB34[一般工业技术—材料科学与工程]