PCB型电磁感应式直线位移传感器短周期误差抑制方法  

Short-Period Error Suppression Method of PCB-Based Inductive Linear Displacement Sensor

作　　者：汤其富[1,2] 李咪 赵静 郭羊庭 彭松 TANG Qifu;LI Mi;ZHAO Jing;GUO Yangting;PENG Song(Engineering Center of Mechanical Testing Technology and Equipment,Ministry of Education,Chongqing University of Technology,Chongqing 400054,China;Chongqing Key Laboratory of Time-Grating Sensing and Advanced Testing Tech-nology,Chongqing University of Technology,Chongqing 400054,China)

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程研究中心,重庆400054 [2]重庆理工大学时栅传感及先进检测技术重庆市重点实验室,重庆400054

出　　处：《西南交通大学学报》2024年第6期1314-1321,共8页Journal of Southwest Jiaotong University

基　　金：国家自然科学基金项目(51875069);重庆市自然科学基金项目(cstc2019jcyj-msxmX0718)。

摘　　要：在直线位移测量中,基于PCB(printed circuit board)工艺的新型电磁感应式位移传感器因具有较大栅距,在制造、装配等工艺环节易导致短周期误差.在所导致的短周期误差类型中,1次和4次误差是PCB型电磁感应式直线位移传感器中最常见的短周期误差.为减小测量过程中产生的1次和4次误差,本文从输出信号出发,针对此2种误差的产生机理开展研究,并提出一种不依赖外部基准的误差自我修正方法.首先,从理论层面分析短周期1次和4次误差的来源,以及2种误差与传感器原始SIN(sine)和COS(cosine)信号的函数关系;然后,建立基于传感器原始SIN和COS信号特征的短周期误差函数模型,并根据本文传感器样机的实测数据计算出误差函数模型中1次和4次误差的相应参数;最后,将1次和4次误差模型用于传感器样机的误差补偿.研究结果表明:补偿后的样机实验结果显示误差峰值由51.6μm减小到36.2μm,其中,短周期1次误差减小了约64.5%,短周期4次误差减小了约83.0%.In the linear displacement measurement,the printed circuit board(PCB)-based new inductive displacement sensors is easy to lead to short-period errors in manufacturing,assembly,and other process links because of its large pitch.Among the types of short-period errors caused,the first-order and fourth-order errors are the most common short-period errors in PCB-based inductive linear displacement sensors.Therefore,in order to reduce the first-order and fourth-order errors,the generation mechanism of these two kinds of errors was first studied from the output signals,and then an error self-correction method that did not depend on external reference was proposed.Firstly,the sources of short-period first-order and fourth-order errors and the functions of the two errors with the original sine(SIN)and cosine(COS)signals of the sensor were analyzed theoretically.Then,a short-period error function model based on the characteristics of the original SIN and COS signals of the sensor was established,and the corresponding parameters of the first-order and fourth-order errors in the error function model were calculated based on the measured data of the sensor prototype.Finally,the first-order and fourth-order error models were used for the error compensation of the sensor prototype.The results of prototype experiments show that the peak-to-peak value of the error after compensation is reduced from 51.6μm to 36.2μm.The short-period first-order error is reduced by about 64.5%,and the short-period fourth-order error is reduced by about 83.0%.

关 键 词：传感器 直线位移 电磁感应 误差抑制 自校正 

分 类 号：TH711[机械工程—测试计量技术及仪器]