线位移传感器动态校准装置测量不确定度评定  

Evaluation of measurement uncertainty of dynamic calibration device for linear displacement sensors

作　　者：陈静 杨璐 万凌锋 刘振彪 邹成娜 CHEN Jing;YANG Lu;WAN Lingfeng;LIU Zhenbiao;ZOU Chengna(Hunan Institute of Metrology and Test,Changsha 410014,China)

机构地区：[1]湖南省计量检测研究院,湖南长沙410014

出　　处：《工业计量》2024年第6期60-62,共3页Industrial Metrology

基　　金：自然科学基金-科市联合项目(2022JJ90049)。

摘　　要：现有校准线位移传感器的方法均为静态、非连续的检测方法,存在效率低、精度差等缺陷。文章基于激光干涉仪为主标准器设计了线位移传感器的动态校准装置,并对装置进行了测量不确定度评定,结果表明该装置有效提升了校准效率及精度。At present,the existing methods for calibrating linear displacement sensors are static and discontinuous measuring methods,which have shortcomings such as low efficiency and poor accuracy.This article designs a dynamic calibration device for linear displacement sensors based on a laser interferometer as the main standard,and evaluates the measurement uncertainty of the device.The results show that the device effectively improves calibration efficiency and accuracy.

关 键 词：线位移传感器 激光干涉仪 动态校准 不确定度评定 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]