单晶氧化镁高温光纤传感技术应用方法研究  

Research on the Application of Single-crystal MgO in High Temperature Optical Fiber Sensing Technology

作　　者：刘佳[1] 廖宇康 涂嘉成 李加顺 刘豪 LIU Jia;LIAO Yukang;TU Jiacheng;LI Jiashun;LIU Hao(State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China;Division of Optical fiber Application Technology,The 46th Research Institute of China Electronic Technology Corporation,Tianjin 300220,China)

机构地区：[1]中北大学省部共建动态测试技术国家重点实验室,太原030051 [2]中国电子科技集团公司第四十六研究所光纤应用技术事业部,天津300220

出　　处：《光子学报》2024年第11期61-72,共12页Acta Photonica Sinica

基　　金：山西省基础研究项目(Nos.20210302124266,20210302124311);国家自然科学基金(No.62105304);天津市自然科学基金青年(No.22JCQNJC00340)。

摘　　要：提出采用氧化镁制作方形法珀腔的压力敏感单元,利用微机电系统技术实现其热应力匹配一体化、批量化加工,集成光纤实现高温压力检测。对氧化镁压力敏感单元进行全温区和动态仿真以及高温压力测试平台实验验证,结果表明采用氧化镁作为敏感材料的传感器在室温、15 MPa的压力范围内腔长呈近似线性变化,非线性误差为0.75%FS,且在室温~800℃范围内均能稳定工作。该材料在传感领域的应用为航空发动机内外部高温狭小空间或受关注位置的原位压力测试提供了一种新的思路。Pressure detection under high temperature environments has an urgent need in aerospace,equipment development,petrochemical and other fields.Especially,with the development of space industry and the research of new generation engines,in-situ pressure measurement of key parts such as pipes,chambers and combustion chambers plays an important role in engine test,combustion instability analysis,mode switching of engine systems and so on.Consequently,it is highly necessary to research on the design,manufacture and testing methods of the sensors.Compared with the traditional electrical sensors,fiber-optic sensor has the advantages of small size,long transmission distance and immunity to electromagnetic interference.Through the analysis of the high temperature pressure sensors based on fiber-optics Fabry-Perot principle,the operating temperature is mainly limited by the sensor composition material,sensitive unit processing method,signal transmission mode and demodulation method.The high-temperature resistance performance of sensitive materials directly determines the upper temperature limit of the sensor.Thermal stress mismatch is another significant factor causing the failure of sensors in harsh environments.In addition,the transmission and extraction methods of the characteristic signal are the difficult points of high-temperature pressure sensors.To address the above limitations,there are many researches on quartz,silicon,silicon carbide,sapphire and other high-temperature resistant materials as sensitive unit in high temperature region to improve the operating temperature.Meanwhile,MEMS and femtosecond laser processing methods have great advantages in sensor consistency and thermal stress matching manufacturing.Among the single-crystal oxide materials,single crystal magnesium oxide material shows high application value in the fields of high-temperature fiber-optic sensing because of its ultra-high melting point,excellent optical and mechanical properties.In this paper,combining the advantages of magnesium oxide mater

关 键 词：氧化镁晶圆 微机电系统 光纤法珀 压力敏感单元 高温 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]