热等静压工艺对Yb:YAG复合激光晶体性能影响  

Effect of Hot Isostatic Pressing on Properties of Yb∶YAG Composite Laser Crystals

作　　者：陈照 刘文鹏[1,3] 孙彧[1,3] 蒋金宏 高进云 王小飞 孙贵花 窦仁勤[1,3] 张德明 罗建乔[1,3] 张庆礼 CHEN Zhao;LIU Wenpeng;SUN Yu;JIANG Jinhong;GAO Jinyun;WANG Xiaofei;SUN Guihua;DOU Renqin;ZHANG Deming;LUO Jianqiao;ZHANG Qingli(Anhui Provincial Key Laboratory of Photonic Devices and Materials,Anhui Institute of Optics and Fine Mechanics,Hefei Institutes of Physical Science,Chinese Academy of Sciences,Hefei 230031,China;University of Science and Technology of China,Hefei 230026,China;Advanced Laser Technology Laboratory of Anhui Province,Hefei 230037,China)

机构地区：[1]中国科学院合肥物质科学研究院安徽光学精密机械研究所安徽省光子器件与材料重点实验室,合肥230031 [2]中国科学技术大学,合肥230026 [3]安徽省先进激光技术重点实验室,合肥230037

出　　处：《光子学报》2024年第11期92-103,共12页Acta Photonica Sinica

基　　金：安徽省科技重大专项(No.202203a05020002);国家自然科学基金(No.52272011);国家重点研究发展计划(Nos.2022YFB3605703,2023YFB3507403);中国科学院青年创新促进会(No.2023463)。

摘　　要：由于施压不均匀、升温时温场分布不均匀等因素,键合晶体键合面上会产生气泡、孔洞、裂纹等缺陷。将热等静压技术与热键合技术结合,控制热等静压参数,可减少或消除键合晶体烧结后的内部缺陷。对键合晶体在不同温度、压强、恒温时间进行热等静压实验,并通过弯曲强度、维氏硬度、透过光谱和光学均匀性测试对热等静压后的元件进行表征。借助金相显微镜观察键合晶体内部孔隙消除与缺陷的闭合情况,通过分析颗粒间应力变化,研究了热等静压工艺缺陷减少或消除机理。实验结果表明,热等静压后键合晶体元件键合面上的气泡与缺陷大幅度降低,弯曲强度较热等静压前提升185.29%,维氏硬度提升16.14%,透过率和光学均匀性明显提高。In recent years,high power solid-state lasers have been developing in the direction of higher average power and larger pulse energy,which puts higher and higher requirements on the size and quality of the laser crystal materials.The preparation of high quality laser crystals with larger size has become one of the important issues to be solved in laser development,so the thermal bonding technology has become an effective technical way to prepare large size laser crystals.Thermal bonding technique,also known as diffusion bonding technique,is a process in which two precise-machined crystal interfaces are pressed together and combined through van der Waals force or hydrogen bond,and then heated to form an integrated uniform crystal by ion thermal diffusion.The preparation of composite crystals by the thermal bonding technology has been widely used in laser field.The composite crystals can not only significantly improve the thermal management of high power lasers and obtain high optical quality lasers,but also is an important way to prepare larger crystals.However,in the process of the bonded crystals preparation,due to the factors such as uneven pressure and uneven distribution of temperature field during heating,the bonding surface will produce bubbles,holes,cracks and other defects,which seriously affect the quality and success rate of the bonded crystals.The Hot Isostatic Pressing(HIP)technique is to place the components to be treated in a closed container,and apply the same pressure to the components and apply high temperature at the same time.Under the action of high temperature and high pressure,the internal defects of the components can be eliminated.By combining HIP technology with the thermal bonding technology and controlling hot isostatic pressing parameters,the internal defects of bonded crystals after sintering can be reduced or eliminated.In this paper,the treatment of large size Yb∶YAG/Yb∶YAG composite laser crystals by hot isostatic pressing technique was studied.The hot isostatic pressing of Yb�

关 键 词：热键合 热等静压 复合激光晶体 YB:YAG 透过光谱 弯曲强度 光学均匀性 

分 类 号：O439[机械工程—光学工程]