钢水测温热电偶温度传感器性能改进  

Performance Improvement of ThermocoupleTemperature Sensors for Liquid Steel Temperature Measurement

作　　者：姚江林 宫爱红[1] 刘帅 胡明茂[1,3] Yao Jianglin;Gong Aihong;Liu Shuai;Hu Mingmao(School of Mechanical Engineering,Hubei University of Automotive Technology,Shiyan 442002,China;Instrumentation Technology and Economy Institute,Beijing 100055,China;Provincial Key Laboratory of Automotive Power Transmission and Electronic Control,Shiyan 442002,China)

机构地区：[1]湖北汽车工业学院机械工程学院,湖北十堰442002 [2]机械工业仪器仪表综合技术经济研究所,北京100055 [3]汽车动力传动与电子控制湖北省重点试验室,湖北十堰442002

出　　处：《湖北汽车工业学院学报》2024年第4期38-42,共5页Journal of Hubei University Of Automotive Technology

基　　金：国家重点研发计划资助项目(2021YFB3202401)。

摘　　要：针对钨铼热电偶温度传感器在钢水中易被破坏的问题,采用氧化锆靶在钨铼热电偶丝上通过射频磁控溅射的方法制备ZrO2涂层,设计正交试验选择溅射工艺参数,并进行钢水测温试验,结果表明:涂层原子浓度受各因素影响的主次顺序是溅射功率、薄膜压力、偏置电压;溅射最优参数是溅射功率200 W、薄膜压力1.2 Pa、偏置电压150 V,制备的钢水温度传感器测温时长达到327.4 s,相对于未镀膜的参照组提升了约485%,且稳定性较好。tungsten-rhenium thermocouple temperature sensors are easily damaged in liquid steel.To address this issue,ZrO2 thin films were prepared by radio frequency magnetron sputtering on tungsten-rhenium thermocouple wires using zirconia targets.Orthogonal experiments were designed to select the sputtering process parameters,and liquid steel temperature measurement experiments were conducted.The experimental results show that the main and secondary factors affecting the atomic concentration of the coating are sputtering power,thin film pressure,and bias voltage.The optimal parameters for sput-tering are a sputtering power of 200 W,a thin film pressure of 1.2 Pa,and a bias voltage of 150 V.The preparedliquid steel temperature sensor has good stability.Compared to the uncoated reference group,the temperature measurement time was up to 327.4 seconds and has increased by about 485%.

关 键 词：测温传感器 钨铼热电偶 氧化锆涂层 磁控溅射 

分 类 号：TH811[机械工程—仪器科学与技术]