离子磁控溅射方式对不同表面性质材料扫描电子显微镜(SEM)图像的影响  

Effect of Ion Magnetron Sputtering Method on Scanning Electron Microscopy(SEM)Images of Materials with Different Surface Properties

作　　者：李海霞 叶韫 江煜堎 陶丽丽 杨亿斌 殷陶[1] 孙志鹏 LI Haixia;YE Yun;JIANG Yuleng;TAO Lili;YANG Yibin;YIN Tao;SUN Zhipeng(School of Materials and Energy,Guangdong University of Technology,Guangzhou 510006,China)

机构地区：[1]广东工业大学材料与能源学院,广东广州510006

出　　处：《材料保护》2024年第12期107-113,共7页Materials Protection

基　　金：广东省自然科学基金-面上项目(2024A1515011219);国家自然科学基金-面上项目(52273104)。

摘　　要：旨在探讨离子磁控溅射仪的条件参数对不同表面性质非导电材料扫描电子显微镜(SEM)图像的影响,研究溅射靶材、溅射时间和溅射次数等不同离子磁控溅射条件的优缺点和使用范围。结果表明:黄金靶材连续性好,金晶粒成核性大,溅射动能较大,易造成样品表面热损耗,金晶粒贴附在样品表面,故黄金靶材适合低倍率SEM图像观察(<10000)以及样品表面具有一定硬度的材料;铂金靶材连续性差,铂晶粒成核小,溅射动能较小,易嵌入样品表面形成形貌骨架支撑,适合高倍率SEM图像观察(>30000)以及大部分非导电材料;采用少时多次离子磁控溅射方法,适当减少溅射次数不仅可以削弱金膜对材料形貌和结构的影响,而且还可以节约资源保护环境。该结果为科研工作者科学、真实地分析样品的SEM图像提供了试验指导意见。In order to investigate the effect of ion magnetron sputtering parameters on the scanning electron microscopy(SEM)images of nonconductive materials with different surface properties,the advantages and limitations of various ion magnetron sputtering conditions,including target material,sputtering time and sputtering cycles were studied,along with their applicable ranges.Results showed that the gold target exhibited good continuity with large grain nucleation of gold.Due to its high sputtering energy,it easily caused thermal loss on the sample surface,and the gold grains adhered to the surface.Therefore,gold targets were found to be suitable for lowmagnification SEM imaging(<10000)and materials with a certain surface hardness.In contrast,the platinum target showed poor continuity with small platinum grain nucleation and lower sputtering energy.It was more likely to embed into the sample surface,forming a morphological framework,making it suitable for highmagnification SEM imaging(>30000)and most nonconductive materials.Using a method of fewer,multiple ion magnetron sputtering cycles,reducing the sputtering cycles appropriately not only weakened the effect of the gold film on the material’s morphology and structure but also helped conserve resources and protect the environment.This result provides experimental guidance for researchers to scientifically and accurately analyze SEM images of samples.

关 键 词：扫描电子显微镜 离子磁控溅射 非导电材料 表面性质 图像 

分 类 号：TN16[电子电信—物理电子学]