块体硅高效氮化制备高α相氮化硅陶瓷研究  

Study on Preparation of Highα-Phase Silicon Nitride Ceramics by Efficient Nitridation of Bulk Silicon

作　　者：张萌春 张菊梅[1] 张腾[1] 牛立斌[1] 张国琛 ZHANG Mengchun;ZHANG Jumei;ZHANG Teng;NIU Libin;ZHANG Guochen(School of Materials Science and Engineering,Xi'an University of Science&Technology,Xi'an 710054,China)

机构地区：[1]西安科技大学材料科学与工程学院,陕西西安710054

出　　处：《热加工工艺》2024年第23期75-80,共6页Hot Working Technology

基　　金：陕西省重点研发计划项目(2023-YBGY-090);校企联合项目(6000211045)。

摘　　要：通过直接氮化法结合高能球磨制备高α相氮化硅块体。以硅粉为原料,添加不同质量分数的α-Si_(3)N_(4)稀释剂混合冷压制成不同厚度的块体,在1350℃氮化不同时间制备了Si_(3)N_(4)块体,研究了块体硅直接氮化反应合成氮化硅块体的工艺因素,借助XRD检测手段测定氮化产物的物相组成。结果表明:含15%稀释剂(α-Si_(3)N_(4))、厚度为3 mm的块体硅在流动氮气气氛下,于1350℃保温3 h的氮化效果最佳,氮化产物由3种物相组成,各物相的质量分数为88.7%α-Si_(3)N_(4)、10.2%β-Si_(3)N_(4)、1.1%Si,合成了含高α相的氮化硅块体。本研究结果可为块体高α相氮化硅的高效制备提供实验依据。Highα-phase silicon nitride bulk was prepared by direct nitridation method combined with high-energy ball milling.Taking silicon powder andα-Si_(3)N_(4) diluents with different mass ratios as the raw material,the green block with different thicknesses were compressed,then the Si_(3)N_(4) bulk materials were prepared by nitriding at 1350℃for different times.The process factors for the synthesis of silicon nitride bulk materials through direct nitridation reaction of silicon blocks were investigated.The results show that when the silicon block with a thickness of 3 mm and 15%diluent(α-Si_(3)N_(4))content is nitrided at 1350℃for 3 h under a flowing nitrogen gas atmosphere,the nitridation effect is the best,and the products consist of three phases.The mass content of each phase is as follows:α-Si_(3)N_(4)(88.7%),β-Si_(3)N_(4)(10.2%),and Si(1.1%).The process successfully synthesizes silicon nitride bulk materials with a highα-phase content.The results of the study provide evidence for the efficient preparation of bulk silicon nitride with highα-phase content.

关 键 词：直接氮化 氮化硅 稀释剂 

分 类 号：TG154.2[金属学及工艺—热处理]