一种高精度的RC振荡器电路  

A High-Precision RC Oscillator Circuit

作　　者：张亮 王静 冯玉明 Zhang Liang;Wang Jing;Feng Yuming(Guangdong Qixin Semiconductor Co.,Ltd.,Zhuhai 519000,China)

机构地区：[1]广东齐芯半导体有限公司,广东珠海519000

出　　处：《半导体技术》2025年第1期71-76,共6页Semiconductor Technology

摘　　要：为了给微处理器芯片提供高精度的内部时钟,基于110 nm CMOS工艺设计了一种高精度电阻电容(RC)振荡器电路。通过在振荡器结构中引入充放电电流粗调电路、参考电压细调电路、温度系数调节电路,实现了对振荡器电路的工艺偏差、电压敏感度、温度敏感度的有效补偿。细调电路提取与电压、工艺及温度都无关的比例系数作为频率调节因子;温度系数调节电路通过合理匹配使得常温下电阻不受档位变化的影响,改善温度系数的同时提高了档位调节过程中的频率稳定性。芯片实测结果显示,经过粗调、细调和温度系数调节三重校正后,振荡器典型输出频率为8 MHz,在-40~150℃的全温度范围内频率变化小于±0.5%,实现了对RC振荡器电路工艺偏差、电压敏感度、温度敏感度的补偿。To provide high-precision internal clocks for microprocessor chips,a high-precision resistance-capacitance(RC)oscillator circuit was designed based on 110 nm CMOS process.By introducing a coarse adjustment circuit for charging and discharging current,a fine tuning circuit for reference voltage and a temperature coefficient adjustment circuit into the oscillator structure,effective compensation for process deviation,voltage sensitivity and temperature sensitivity of the oscillator circuit was realized.The fine tuning circuit extracts proportional coefficients which are independent of voltage,process and temperature as frequency adjustment factors.Through reasonable matching,the temperature coefficient adjustment circuit ensures that the resistance at room temperature is not affected by gear changes,improving the temperature coefficient and frequency stability during gear adjustment.The chip test result shows that after triple correction of coarse tuning,fine tuning and temperature coefficient adjustment,the typical output frequency of the oscillator is 8 MHz,and the frequency change within the full temperature range of-40-150℃is less than±0.5%.Therefore,the compensation for process deviation,voltage sensitivity and temperature sensitivity of the RC oscillator circuit is realized.

关 键 词：高精度 电阻电容(RC)振荡器 电压系数修调 温度补偿 CMOS工艺 

分 类 号：TN752[电子电信—电路与系统] TN432