螺杆真空泵内气体热力过程的数值计算及模拟分析  

Numerical Calculation and Simulation Analysis of Gas Thermodynamic Process in Screw Vacuum Pump

作　　者：程寅 王桂鹏 李喆 倪伟明 王健[1] 谢元华[1] 刘坤[1,3,4] CHENG Yin;WANG Guipeng;LI Zhe;NI Weiming;WANG Jian;XIE Yuanhua;LIU Kun(School of Mechanical Engineering and Automation,Northeastern University,Shenyang 110819,China;Nantes Université,École Centrale Nantes,LHEEA,UMR 6598,Nantes 44000,France;National Frontiers Science Center for Industrial Intelligence and Systems Optimization,Northeastern University,Shenyang 110819,China;Key Laboratory of Data Analytics and Optimization for Smart Industry,Ministry of Education,Northeastern University,Shenyang 110819,China)

机构地区：[1]东北大学机械工程与自动化学院,沈阳110819 [2]法国南特中央理工学院流体动力学、能量和大气环境研究实验室,南特44000 [3]东北大学工业智能与系统优化国家级前沿科学中心,沈阳110819 [4]东北大学智能工业数据解析与优化教育部重点实验室,沈阳110819

出　　处：《真空科学与技术学报》2024年第12期1040-1051,共12页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金项目(U22A20179);高等学校学科创新引智计划项目(B16009)。

摘　　要：螺杆真空泵内气体的热力过程能直接反映其抽气性能,具有重要研究价值。以某种变螺距螺杆真空泵为对象,在绝热、多变和等温三种内压缩形式下,研究泵内气体压力、温度、内能和焓等热力学参数随时间的变化规律。计算等螺距与变螺距两种螺杆真空泵在相同工况下排气温度随吸气压力的变化趋势,模拟分析两种泵的温度场、压力场及转子变形量的分布。理论计算表明,两种螺杆泵的排气温度均随入口压力升高呈现先缓慢后迅速的下降趋势,变螺距螺杆泵的排气温度在发生过压缩后保持不变,相同入口压力下的排气温度从高到低依次为绝热过程、多变过程、等温过程。流场模拟能够考虑级间泄漏和进出口返流情况,描述泵内气体压力和温度分布更加准确。流场模拟的温度与压力结果均高于理论计算值。变形模拟表明,螺杆转子弯曲是影响变形的重要因素,相同长度的等螺距转子更易发生弯曲,模拟得到的螺杆转子变形规律与工程实际具有一致性。The thermodynamic process within screw vacuum pumps directly reflects its performance,holding significant research value.This study focuses on two types of screw vacuum pumps,analyzing the thermodynamic parameters including pressure,temperature,internal energy,and enthalpy of gas based on adiabatic,polytropic,and isothermal processes.The correlation between exhaust temperature and suction pressure for constant and variable pitch screw vacuum pumps was calculated.Additionally,the distribution of temperature,pressure,and deformation of rotors was analyzed through numerical simulation.The calculations indicate that as the suction pressure increases,the exhaust temperatures initially decrease slowly and then rapidly.For the variable pitch screw vacuum pump,the exhaust temperature remains constant after over-compression;the order of exhaust temperature at the same suction pressure is adiabatic,polytropic,and isothermal processes.The numerical simulation gives more accurate results for covering the effect of leakage and backflow,with higher temperatures and pressures than theoretical calculations.Deformation simulation indicates that bending is a significant factor affecting the deformation of the screw rotors,with constant pitch rotors being more prone to bending.The deformation pattern of the screw rotor obtained from numerical simulations can be verified in practical engineering.

关 键 词：螺杆真空泵 热力学过程 排气温度 数值模拟 

分 类 号：TB752[一般工业技术—真空技术]