基于动/静态力反馈的变振幅模糊控制超声波封接  

Ultrasonic Bonding of Variable Amplitude Fuzzy Control Based on Dynamic/Static Force

作　　者：孙屹博[1] 张云翔 朱建宁 孙杨 邹丽 杨鑫华 SUN Yibo;ZHANG Yunxiang;ZHU Jianning;SUN Yang;ZOU Li;YANG Xinhua(Zhan Tianyou College(CRRC College),Dalian Jiaotong University,Dalian 116028,China;Dalian Key Laboratory of Welded Structures and Intelligent Manufacturing Technology of Rail Transportation Equipment,Dalian 116028,China)

机构地区：[1]大连交通大学詹天佑学院(中车学院),辽宁大连116028 [2]大连市轨道交通装备焊接结构与智能制造技术重点实验室,辽宁大连116028

出　　处：《大连交通大学学报》2024年第6期78-83,共6页Journal of Dalian Jiaotong University

基　　金：国家自然科学基金项目(52005071);辽宁省自然科学基金项目(2022-MS-342)。

摘　　要：为提高超声波封接界面熔合精度,提出了一种基于模糊控制的变振幅超声波封接方法。采用模糊控制算法分别设计了以动/静态力信号为输入、超声波振幅为输出的模糊控制器。对聚甲基丙烯酸甲酯(PMMA)微连接器与基底进行了封接试验,在封接初期,采用较大振幅加速接触表面的初始熔化并抑制了溢流缺陷,在封接中后期,以较小的振幅实现整个界面融合,以削弱超声空化效应。研究了界面的熔合状况,分析了振幅参数对气泡和溢流缺陷的影响。结果表明,基于静态力的模糊变振幅控制下的封接质量最好,气泡基本消除,溢流得到有效抑制,提高了熔合精度。In order to improve the fusion accuracy of the ultrasonic bonding interface, a variable amplitude ultrasonic bonding method based on fuzzy control is proposed. Two fuzzy controllers with dynamic and static force signals as input and ultrasonic amplitude as output are designed by fuzzy control algorithm. The bonding experiment of polymethyl methacrylate(PMMA) micro-connector and substrate is carried out. In the early stage of bonding, a large amplitude is used to accelerate the initial melting of the contact surface and suppress the overflow defect. In the middle and late stages of bonding, the entire interface is fused with a smaller amplitude to weaken the ultrasonic cavitation effect. The fusion state of the interface is studied, and the influence of amplitude parameters on bubbles and overflow defects is analyzed. The results show that the bonding quality under the fuzzy variable amplitude control based on static force is the best. The bubbles are basically eliminated, the overflow is effectively suppressed, and the fusion accuracy is improved.

关 键 词：超声波封接 模糊控制 变振幅 动态力 静态力 

分 类 号：TN05[电子电信—物理电子学] TB559[理学—物理]