Optically-powered Optical Fiber Pressure Sensor of Diffused Silicon  

作　　者：LIU Zhiyan(Yanshan University,Qinhuangdao 066004,CHN) 

出　　处：《Semiconductor Photonics and Technology》1996年第2期137-141,共5页半导体光子学与技术（英文版）

摘　　要：In this paper an optically-powered optical fiber sensor for pressure measurement is introduced.Differential strain gauges of diffused silicon are employed as sensing elements and a micro-power-consumption circuit is used in the probe.Pulse width modulation and pulse position modulation are adopted for signal processing.Ｏｐｔｉｃａｌｌｙ－ｐｏｗｅｒｅｄＯｐｔｉｃａｌＦｉｂｅｒＰｒｅｓｓｕｒｅＳｅｎｓｏｒｏｆＤｉｆｆｕｓｅｄＳｉｌｉｃｏｎＬＩＵＺｈｉｙａｎ（ＹａｎｓｈａｎＵｎｉｖｅｒｓｉｔｙ，Ｑｉｎｈｕａｎｇｄａｏ０６６００４，ＣＨＮ）Ａｂｓｔｒａｃｔ：Ｉｎｔｈｉｓ...

关 键 词：Pressure Sensor Optical Fiber Sensors PWM PPM 

分 类 号：TH812[机械工程—仪器科学与技术] TP212[机械工程—精密仪器及机械]