单手性半导体碳纳米管的分离及其在电子学中的应用研究进展  

Advances in Separation of Monochiral Semiconducting Carbon Nanotubes and the Application in Electronics

作　　者：孙雅楠 雷毅敏[1,2] 祝杰杰 魏宇翔 张鹏 朱青[2] 李培咸 马晓华[2] SUN Yanan;LEI Yimin;ZHU Jiejie;WEI Yuxiang;ZHANG Peng;ZHU Qing;LI Peixian;MA Xiaohua(Department of Advanced Materials and Nanotechnology,Xidian University,Xi′an 710126,CHN;Department of State Key Laboratory of Wide‑bandgap Semiconductor Devices and Integrated Technology,School of Microelectronics,Xidian University,Xi′an 710071,CHN)

机构地区：[1]西安电子科技大学先进材料与纳米技术学院,西安710126 [2]西安电子科技大学微电子学院宽禁带半导体器件与集成技术国家重点实验室,西安710071

出　　处：《固体电子学研究与进展》2024年第6期519-546,共28页Research & Progress of SSE

基　　金：国家自然科学基金面上基金资助项目(62274130);陕西省科技厅基金资助项目(2016FWPT-09);陕西省自然科学基础研究计划-面上项目基金资助项目(2022JM-088);教育部联合基金资助项目(8091B042112);国家自然科学基金青年基金资助项目(62204185)。

摘　　要：半导体性单壁碳纳米管(Semiconducting single-walled carbon nanotubes,s-SWCNTs)以其高载流子迁移率和弹道运输等优异的电学特性,成为后摩尔时代新型半导体材料的有力竞争者。经过20多年的发展,碳基电子技术在s-SWCNTs的材料提纯、基于s-SWCNTs的场效应晶体管(CNT FETs)的制备,以及基于CNT FETs的器件物理等基础问题上已经取得显著进展。然而s-SWCNTs的手性多样性引发的CNT FETs电学性能波动等问题,限制了s-SWCNTs在具有先进制程和卓越性能的高端集成电路(Integrated circuit,IC)中的应用。单手性的s-SWCNTs不仅展现出优异的电学性能,还具有可控的结构和稳定的性能,这些特性对其在高端IC中的应用至关重要。尽管如此,在提高单手性s-SWCNTs的分离纯度和产量,以及优化单手性CNT FETs方面,仍面临诸多挑战。本文综述了碳纳米管手性分选的方法,并重点讨论了共轭聚合物后处理方法的研究进展。然后总结了单手性CNT FETs的研究进展,并分析了未来的发展方向。最后对单手性s-SWCNTs的应用前景进行了展望,分析了未来将要面临的挑战和机遇。Semiconducting single-walled carbon nanotubes(s-SWCNTs) have become a strong competitor for new semiconductor materials in the post-Moore era due to their excellent electrical properties such as high carrier mobility and ballistic transport.After more than 20 years of development,carbon-based electronic technology has made significant progress in material purification of s-SW-CNTs,preparation of s-SWCNT-based field-effect transistors(CNT FETs),and device physics based on CNT FETs.However,the chiral diversity of s-SWCNTs leads to fluctuations in the electrical properties of CNT FETs,which limits the application of s-SWCNTs in high-end integrated circuits(ICs) with advanced processes and excellent performance.Monochiral s-SWCNTs not only exhibit excellent electrical properties,but also have controllable structures and stable performance,which are crucial for their application in high-end ICs.However,there are still many challenges in improving the separation purity and yield of monochiral s-SWCNT,as well as optimizing monochiral CNT FETs.This article reviews the methods of chiral sorting of carbon nanotubes and focuses on the research progress of post-processing sorting for conjugated polymers.Then,the research progress of monochiral CNT FETs is introduced,and future development directions are summarized and analyzed.Finally,the application prospects of chiral-enriched s-SWCNTs include challenges and future opportunities.

关 键 词：半导体性碳纳米管 单手性 共轭聚合物包裹 场效应晶体管 

分 类 号：TQ127.11[化学工程—无机化工]