多晶金刚石散热片制备工艺研究  

Study on Preparation Technology of Polycrystalline Diamond Heat Sink

作　　者：郝晓斌 李一村 孔霞 吕继磊 成楚飞 代兵[1] 郭怀新[4] 朱嘉琦[1,2] HAO Xiaobin;LI Yicun;KONG Xia;LYU Jilei;CHENG Chufei;DAI Bing;GUO Huaixin;ZHU Jiaqi(National Key Laboratory of Science and Technology on Advanced Composites in Special Environments,Harbin Institute of Technology,Harbin 150080,CHN;Zhengzhou Research Institute,Harbin Institute of Technology,Zhengzhou,450000,CHN;Hubei Carbon Six Science and Technology Co.,Ltd.,Yichang,Hubei,443000,CHN;National Key Laboratory of Solid‑state Microwave Devices and Circuits,Nanjing Electronic Devices Institute,Nanjing,210016,CHN)

机构地区：[1]哈尔滨工业大学特种环境复合材料技术国家级重点实验室,哈尔滨150080 [2]哈尔滨工业大学郑州研究院,郑州450000 [3]湖北碳六科技有限公司,湖北宜昌443000 [4]南京电子器件研究所固态微波器件与电路全国重点实验室,南京210016

出　　处：《固体电子学研究与进展》2024年第6期556-560,共5页Research & Progress of SSE

基　　金：中央高校基本科研业务费专项资金资助(HIT.OCEF.2022048);国家自然科学基金国际(地区)合作与交流项目(52261135545);国家重点研发计划变革性技术项目(2020YFA0709700)。

摘　　要：通过微波等离子体化学气相沉积(Microwave plasma chemical vapor deposition,MPCVD)方法制备了不同工艺条件下的多晶金刚石散热片,并对其热导率、翘曲、表面形貌、晶体取向和拉曼光谱进行测试和分析。结果表明,甲烷浓度和生长温度对金刚石生长速率和品质都有较大影响,适当降低甲烷浓度并提高生长温度有助于制备低翘曲、高热导率的高品质多晶金刚石散热片。Polycrystalline diamond heat sinks were prepared by microwave plasma chemical vapor deposition(MPCVD) under different processes,and their thermal conductivity,warpage,surface morphology,crystal orientation and Raman spectra were tested and analyzed.The results show that the growth rate and quality of diamond are greatly affected by methane concentration and growth temperature.Appropriately reducing methane concentration and increasing growth temperature are helpful to prepare high quality polycrystalline diamond heat sinks with low warpage and high thermal conductivity.

关 键 词：金刚石 微波等离子体化学气相沉积 散热 

分 类 号：TN305.94[电子电信—物理电子学]