微热流矢量传感器的声号筒增敏结构设计  

Design of Sound Tube Sensitization Structure of U-Flown Vector Sensor

作　　者：郝涛涛 郭世旭[1] 胡清扬 王萧博 HAO Taotao;GUO Shixu;HU Qingyang;WANG Xiaobo(Key Laboratory of In-Situ Measurement of Ministry of Education,China Jiliang University,Hangzhou Zhejiang 310018,China;National Key Laboratory of Market Supervision,Zhejiang Institute of Metrology,Hangzhou Zhejiang 310063,China)

机构地区：[1]中国计量大学原位计量教育部重点实验室,浙江杭州310018 [2]浙江省计量科学研究院国家市场监管重点实验室,浙江杭州310063

出　　处：《传感技术学报》2024年第12期2029-2036,共8页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金青年基金项目(11904346)。

摘　　要：为了能有效提高微热流矢量传感器的灵敏度,同时不改变其“8”字指向性,设计了一种微型声振速号筒结构,可以在不增加电噪声的前提下,实现微热流MEMS传感器在工作频段内的物理增敏,且对MEMS芯片起到保护作用。通过COMSOL中的热粘性声学模块,建立声号筒仿真模型对理论方程进行求解,选择最优的双锥管型结构;改变声号筒的尺寸参数,确定声号筒的加工尺寸;将MEMS技术加工的微热流传感器和微米级精度3D打印的声号筒组合成联合增敏单元进行空气声学性能测试。最终实验表明:声号筒增敏结构可提供12 dB@200 Hz的灵敏度增益,联合增敏单元有良好的“8”字指向性,横向抑制比为26.09 dB@500 Hz。In order to effectively improve the sensitivity of the micro heat flux vector sensor without changing its‘8’directionality,a micro acoustic vibration velocity horn structure is designed,which can realize the physical sensitization of the micro heat flux MEMS sensor in the working frequency band without increasing the electrical noise,and protect the MEMS chip.Through the thermal viscous acoustic mod-ule in COMSOL,the sound tube simulation model is established to solve the theoretical equation,and the optimal double cone tube struc-ture is selected.The size parameters of the sound tube are changed to determine the processing size of the sound tube.The micro-heat flow sensor processed by MEMS technology and the micro-precision 3D printed sound tube are assembled into a combined sensitization unit for aeroacoustic performance testing.The final experiment shows that the horn sensitization structure can provide a sensitivity gain of 12 dB@200 Hz,the combined sensitization unit has good‘8’directionality,and the lateral suppression ratio is 26.09 dB@500 Hz.

关 键 词：微热流矢量传感器 声号筒增敏结构 联合增敏单元 MEMS 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]