基于等分平均原理的转台转速测量方法研究  

Research on Measurement Method of Rotating Speed of Turntable Using the Equal Division Average

作　　者：佘嘉演 朱维斌[1] 黄垚 邹伟 薛梓[2] SHE Jiayan;ZHU Weibin;HUANG Yao;ZOU Wei;XUE Zi(College of Metrology Measurement and Instrument,China Jiliang University,Hangzhou Zhejiang 310018,China;National Institute of Metrology,Beijing 100029,China)

机构地区：[1]中国计量大学计量测试与仪器学院,浙江杭州310018 [2]中国计量科学研究院,北京100029

出　　处：《传感技术学报》2024年第12期2037-2042,共6页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(52175526);国家质量监督检验检疫总局科技计划项目(2016QK189)。

摘　　要：针对转台运动过程中的转速高精度测量问题开展研究,将等分平均法(Equal Division Average,EDA)应用到转台转速测量领域。首先分析了转台转速测量过程中的误差源,阐述了安装偏心偏斜引起的谐波误差和计数器法带来的±1计数误差对测量精度的影响;采用多传感器等分平均测速实现谐波误差的原理性抑制,提出改进测速方案来降低±1计数误差对测速精度的影响;搭建转台转速测量实验平台验证多传感器等分平均测速效果,实验结果证明了等分平均对谐波误差的抑制作用;150°/s内的多个转速的实验显示EDA方法角速率测量误差小于0.9×10^(-3),角速率测量稳定性优于0.6×10^(-4)。Equal division average(EDA)is applied to the field of rotating speed measurement to realize the high precision measurement of rotating speed in the process of turntable movement.The influence of the harmonic error caused by installation eccentricity and the±1 counting error caused by counter method on measurement accuracy of turntable are analyzed.The measurement method with multi-sensors is used to suppress the harmonic error in principle and an improved velocity measurement scheme is proposed to reduce the im-pact of the±1 counting error on velocity measurement accuracy.A rotating speed measurement experimental platform is built to verify the effect of multi-sensors method based on EDA.The experimental results show that EDA can effectively suppress harmonic error,and the experimental results of multiple speeds within 150°/s show that the rotating speed measurement error of the EDA method is less than 0.9×10^(-3),and the rotating speed measurement stability is better than 0.6×10^(-4).

关 键 词：转台 多传感器 等分平均法 转速 光栅 

分 类 号：TH7[机械工程—仪器科学与技术] TP212.9[机械工程—精密仪器及机械]