不同电极间距AlN基3D-MSM紫外探测器设计与仿真  

Design and simulation of AlN-based 3D-MSM UV detectors with different electrode spacings

作　　者：李滔 饶浩勇 LI Tao;RAO Haoyong(School of Mechanical and Energy Engineering,Shaoyang University,Shaoyang 422000,China;Key Laboratory of Hunan Province for Efficient Power System and Intelligent Manufacturing,Shaoyang 422000,China)

机构地区：[1]邵阳学院机械与能源工程学院,湖南邵阳422000 [2]高效动力系统智能制造湖南省重点实验室,湖南邵阳422000

出　　处：《邵阳学院学报(自然科学版)》2024年第6期36-43,共8页Journal of Shaoyang University:Natural Science Edition

基　　金：湖南省自然科学基金项目(2024JJ7495)。

摘　　要：金属-半导体-金属(metal-semiconductor-metal,MSM)紫外探测器在紫外杀毒、光纤通信、导弹追踪和航空航天等方面具有广泛的应用。根据传统MSM紫外探测器设计了一种基于氮化铝(aluminum nitride,AlN)的3D结构器件(3D-MSM),然后设计了不同电极间距(1、5、10和15μm)MSM器件和3D-MSM器件,并采用APSYS仿真软件分析了AlN基传统MSM器件和3D-MSM器件光电流、暗电流、响应度、时间光电响应及外量子效率等性能参数对器件性能的影响规律。仿真结果表明,采用3D结构后,器件内部电场分布及载流子迁移路径发生变化,器件的响应度得到加强,响应时间缩短,而电极间距越大,3D-MSM器件的光电性能相对于MSM器件的改善越显著。Metal-semiconductor-metal(MSM)UV detectors are commonly employed in various fields,including UV antivirus applications,optical fiber communication,missile tracking,and aerospace.A 3D-MSM UV detector utilizing aluminum nitride(AlN)was designed based on the traditional MSM architecture.This study created MSM and 3D-MSM detectors with varying electrode spacings of 1,5,10,and 15μm and utilized APSYS simulation software to analyze how different performance parameters—such as photocurrent,dark current,responsivity,photoelectric response time,and external quantum efficiency—affect the performance of both AlN-based traditional MSM detectors and 3D-MSM detectors.The simulation results indicate that the introduction of the 3D structure modifies the internal electric field distribution and the carrier migration path within the device,resulting in improved responsivity and reduced response time of detectors.Moreover,the data suggest that the larger the electrode spacing,the more pronounced the enhancement in the photoelectric performance of the 3D-MSM detector compared to that of the traditional MSM detector.

关 键 词：金属-半导体-金属 ALN 3D 紫外探测器 响应度 

分 类 号：TN23[电子电信—物理电子学]