离子溅射对合金靶材寿命的影响  

Influence of energetic heavy ion sputtering on lifetime of alloy target

作　　者：倪唯荣 黄海龙[3] 卢肖勇 王晓冬[3] NI Weirong;HUANG Hailong;LU Xiaoyong;WANG Xiaodong(Research Institude of Physical and Chemical Engineering of Nuclear Industry,Tianjin 300180,China;Science and Technology on Particle Transport and Separation Laboratory,Tianjin 300180,China;School of Mechanical Engineering and Automation,Northeastern University,Shenyang 110167,China)

机构地区：[1]核工业理化工程研究院,天津300180 [2]粒子输运与富集技术重点实验室,天津300180 [3]东北大学机械工程与自动化学院,沈阳110167

出　　处：《物理学报》2025年第1期85-91,共7页Acta Physica Sinica

摘　　要：载能离子入射带负电的离子收集沉积结构过程中会发生离子溅射,一种常用于离子加速过程的结构为圆形金属丝,持续大量离子入射会引起金属丝的表面损失,影响金属丝的服役性能及使用寿命.目前,由于常用于计算溅射产额的SRIM软件无法考虑合金晶体结构中包含的多体相互作用问题,在高能离子入射合金靶材的溅射产额计算上具有较大误差,因此本文基于分子动力学方法结合Langevin控温模型建立了高能金属离子入射合金靶材的离子溅射参数计算模型,该模型具备持续入射过程中合金表面不同状态下的离子溅射参数计算功能,利用该模型计算得到了用于离子加速的阴极金属丝的典型服役寿命,试验值与理论值偏差<10%,验证了理论模型的准确性和适用性,基于此模型进行了金属丝服役寿命提升的理论优化,并提出了使用Ni-Ti合金提升金属丝寿命的方法.When energetic heavy ions are incident on negatively charged structure that collects and deposits ions,ion sputtering will occur.Metal wire is a structure commonly used for accelerating ions,the incidence of continuous high-throughput ions can cause surface loss of metal wire,affecting the service performance and lifespan of the metal wire.The SRIM software commonly used for calculating sputtering yield cannot consider the multi-body interaction problem contained in the alloy crystal structure.So,there is a significant error in calculating the sputtering yield of high-energy ions incident on alloy target.Based on the molecular dynamics method and Langevin temperature control model,the calculation model of ion sputtering parameters of energetic metal ions incident on alloy target is established in this work.The model is used to calculate the sputtering yield under the conditions of intact surface lattice of the target material and long-term incident surface lattice damage.The damages to the cathode metal wire under different incident ion fluences are further calculated,and the crosssectional characterization of the metal wire is carried under typical working condition.The results show that the discrepancy between the experimental value and the theoretical value is less than 10%,which verifies the accuracy and applicability of the theoretical model.Based on this model,the search direction for sputtering resistant materials is proposed,meanwhile,a theoretical optimization is carried out to improve the service life of metal wire,and a method of using Ni-Ti alloy to improve the service life of metal wires is proposed,which is of great significance for predicting the service life of the metal wire under different conditions.

关 键 词：离子溅射 分子动力学 合金靶材 服役寿命 

分 类 号：TG132[一般工业技术—材料科学与工程] O462[金属学及工艺—合金]