基于硅基MEMS微同轴技术的滤波器设计  

Millimeter-wave Bandpass Filter Design Based on Silicon-based MEMS Micro-coaxial Line Technology

作　　者：张婉玉 杨倩[1] 弋航 盛靖超 朱莹[1] 杨怡帆 郭诚 张安学[1] ZHANG Wanyu;YANG Qian;YI Hang;SHENG Jingchao;ZHU Ying;YANG Yifan;GUO Chen;ZHANG Anxue(School of Information and Communications Engineering,Xi’an Jiaotong University,Xi’an 710049,China;Northwest Nuclear Technology Research Institute,Xi’an 710024,China)

机构地区：[1]西安交通大学信息与通信工程学院,西安710049 [2]西北核技术研究院,西安710024

出　　处：《微波学报》2024年第S1期171-174,共4页Journal of Microwaves

基　　金：国家重点研发计划专项(2022YFF0709200)

摘　　要：本文基于硅基MEMS微同轴技术,采用矩形微同轴传输线设计了一款四阶J/K变换器交替耦合的毫米波带通滤波器。首先研究了微同轴传输线的间隙的尺寸及短截线尺寸与等效电容值和电感值的关系,实现J/K变换器物理结构设计;其次,对基于矩形微同轴结构的J/K变换器交替耦合的滤波器进行了设计仿真,设计一个中心频率为94.2GHz,3dB分数带宽为5.6%的带通滤波器;最后进行加工和测试,验证了硅基MEMS微同轴技术实现毫米波滤波器微型化的优势。Based on silicon-based MEMS micro-coaxial line technology,a fourth-order millimeter wave bandpass filter(BPF)with alternating coupling of J/K converters using rectangular micro-coaxial transmission line was proposed.Firstly,the relationships between the size of the gap and the equivalent capacitance values,the size of the shorted stubs and the equivalent inductance values of the micro-coaxial transmission line were studied to achieve the physical structure design of the J/K converter;Secondly,the BPF using the alternating coupling J/K converters based on rectangular micro coaxial structure was designed and simulated with a center frequency of 94.2GHz and a 3dB fractional bandwidth of 5.6%;Finally,the BPF was fabricated and measured to verify the advantages of silicon-based MEMS micro coaxial technology in achieving miniaturization of millimeter wave filters.

关 键 词：MEMS 矩形微同轴 毫米波滤波器 小型化 

分 类 号：TN713[电子电信—电路与系统]