声表面波滤波器的有限元模拟  

Finite element simulation of surface acoustic wave filters

作　　者：王雯隽 马强 WANG Wen-Jun;MA Qiang(School of Mathematics,Sichuan University,Chengdu 610064,China)

机构地区：[1]四川大学数学学院,成都610064

出　　处：《四川大学学报(自然科学版)》2025年第1期237-245,共9页Journal of Sichuan University(Natural Science Edition)

基　　金：国家自然科学基金(11801387);四川省自然科学基金(2022NSFSC0322)。

摘　　要：声表面波滤波器(Surface Acoustic Wave Filter,SAWF)(简称SAW滤波器)是现代通信系统中的一类重要电子元器件.在SAW滤波器的设计和优化中,数值模拟是基本手段之一.为了对SAW滤波器进行高精度数值模拟,本文提出了一种有限元模拟方法.本文建立了SAW滤波器的数学模型,为模型应用周期边界条件,并添加完美匹配层(Perfect Matching Layer,PML),然后再用有限元法得到模型的解.作为例子,本文对典型压电材料为基底的3维SAW滤波器进行了数值模拟,分别给出其简化模型及y方向全结构模型.计算结果表明,相比业界常用的商业软件,本方法同样正确有效.Surface acoustic wave filter(SAW Filter)plays a key role in modern telecommunication systems.Numerical simulation is a typical and powerful tool in the design and optimization of SAW filter.In this paper,a finite element numerical simulation method is proposed for SAW filters.First,a mathematical model is constructed.Then,equipped with periodic boundary condition and perfectly matched layer(PML),the model is solved by using the finite element method.Finally,to show the performance of finite element method,the numerical simulation of a 3D SAW filter based on typical piezoelectric material substrate is taken as an example,the simplified SAW model and the y-direction SAW model are presented.The calculation results show that,in comparison to the commercial software,both correctness and effectiveness of the method are quite well.

关 键 词：SAW滤波器 有限元法 完美匹配层 数值模拟 

分 类 号：O29[理学—应用数学]