掺杂改性氮化物基薄膜摩擦、腐蚀与抗菌性能的研究进展  

Research Progress in Friction,Corrosion and Antibacterial Properties of Nitride-based Films by Doping Modification

作　　者：张懋达 鞠长滨[1] 王珏[1] 韩培培[1] 赵梁 周飞[2] ZHANG Maoda;JU Changbin;WANG Jue;HAN Peipei;ZHAO Liang;ZHOU Fei(AVIC Shenyang Aircraft Industry(Group)Co.,Ltd.,Shenyang 110850,China;National Key Laboratory of Helicopter Transmission Technology,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China)

机构地区：[1]沈阳飞机工业(集团)有限公司,沈阳110850 [2]南京航空航天大学直升机传动技术国家级重点实验室,南京210016

出　　处：《表面技术》2025年第2期70-86,共17页Surface Technology

摘　　要：由于PVD硬质薄膜与金属之间有着较高的黏附强度,且薄膜具有致密结构以及良好的力学、耐磨和耐腐蚀性,同时能够隔绝腐蚀环境中的盐分与材料表面直接接触,因此在其表面沉积具有优异磨损腐蚀和抗菌特性的防护薄膜可以保障金属材料在磨损/腐蚀环境中的长期使用。从传统的二元氮化物薄膜入手,针对薄膜耐磨、防腐与抗菌性能日益增长的需求,综述了Si、C、Mo与Ag元素掺杂对PVD氮化物薄膜在空气与水环境中的摩擦学特性、在盐溶液与海水中的电化学腐蚀与磨损腐蚀特性,以及静态抗菌与摩擦诱导抗菌性能的影响。传统二元的氮化物薄膜已经逐渐发展为多元的CrMoSiCN基薄膜,在这个过程中,重点分析了不同三甲基硅烷反应气体流速与Si、Mo、Ag靶材溅射电流下,薄膜的力学性能与摩擦学特性之间的紧密关联;阐述了薄膜在腐蚀性溶液中磨粒磨损、氧化磨损与电化学腐蚀之间的协同耦合关系;阐明了不同Mo、Ag元素含量下,薄膜的抗微生物黏附与抗菌特性的演变机理。指出多元氮化物基薄膜在盐溶液中的摩擦因数与磨损腐蚀材料损失受到薄膜中Si、Mo与Ag元素掺杂量变化的强烈影响,摩擦过程中的氧化与腐蚀产物有效增强了薄膜的自润滑与减磨特性;而含Mo、Ag氮化物基薄膜的杀菌能力主要与磨痕表面氧化物MoO_(x)的形成和Ag^(+)在菌液中的释放、扩散相关。Due to the high adhesion strength between PVD hard film and metal,as well as the dense structure,good mechanical properties,excellent wear and corrosion resistances of the film,the work aims to deposit a protective film with superior tribo-corrosion and antibacterial characteristics on the metal surface to ensure the long-term use of metallic material in the wear/corrosion environment.Meanwhile,the films can also isolate the salt and microorganisms in the corrosive environment from direct contact with the surface of metallic material.Therefore,the traditional binary nitride films were introduced at first,and then in response to the growing demand for the wear resistance,corrosion resistance,and antibacterial properties of films,the effects of Si,C,Mo and Ag doping on the tribological properties of PVD films in air and water,the electrochemical corrosion and tribo-corrosion properties in the salt solution and seawater,the static and friction-induced antibacterial performances were reviewed.The traditional binary nitride films gradually developed into the multi-component CrMoSiCN-based films and in this process,the close relationship between mechanical and tribological characteristics was analyzed for films prepared at the different flow rates of reactive trimethylsilane gas and various sputtering currents of Si,Mo and Ag targets.The synergistic and cooperative relationships among abrasive wear,oxidative wear and electrochemical corrosion were described for films in the corrosive solution.The mechanism evolution of anti-microbial adhesion and antibacterial properties was elucidated for films under the various Mo and Ag contents.The friction coefficient and tribo-corrosion material losses of multi-component nitride-based films in the salt solution were strongly affected by the doped amounts of Si,Mo and Ag elements,and then the self-lubrication and anti-wear roles of films were effectively enhanced by the oxidation and corrosion products during the friction process.The bactericidal ability of nitride-based films was

关 键 词：磁控溅射 薄膜 摩擦 磨损 腐蚀 抗菌 

分 类 号：TG174.4[金属学及工艺—金属表面处理]