基于激光干涉仪对天文底片扫描仪两轴气浮运动平台垂直度的测量  

Measurement of Squareness of Two-axis Air-bearing Motion Platform for Astronomical Plate Digitizer Based on Laser Interferometer

作　　者：王亮亮[1] 商正君 杨美婷 杨静 董姗 赵建海[1] 于涌[1,2] Wang Liangliang

机构地区：[1]中国科学院上海天文台,上海200030 [2]中国科学院大学,北京100049

出　　处：《工业控制计算机》2025年第1期4-6,9,共4页Industrial Control Computer

基　　金：国家重点研发计划政府间国际科技创新合作专项(2021YFE0103400)资助;国家自然科学基金(12073062)。

摘　　要：上海天文台开展高精度天文底片专用扫描仪的自主研制,垂直度误差是扫描仪所用两轴线性气浮运动平台的关键技术指标之一。基于直线度的干涉测量原理,使用RENISHAW XL80激光干涉仪及光学直角尺搭建垂直度测量光路,对两轴线性气浮式运动平台的垂直度误差进行了测量。测量结果表明:在450 mm×450 mm工作范围内,气浮运动平台两个运动轴的垂直度误差为1.356″,标准偏差为0.121″,满足高精度天文底片扫描仪研制的要求。使用光学直角尺的激光干涉测量方法具备光路布置简便和测量效率高的特点,适合气浮运动平台垂直度的日常检测和标校。Shanghai Astronomical Observatory is developing the high-precision astronomical plate digitizer independently.The squareness error is one of the key technical indexes of the two-axis air-bearing motion platform used in the digitizer.Based on the principle of interference measurement of straightness,a measurement scheme of squareness was constructed using a RENISHAW XL80 laser interferometer and an optical square,and squareness error of two-axis air-bearing motion platform is measured.The measurement results show that squareness error of two-axis air-bearing motion platform is 1.356″ and the standard deviation is 0.121″ in the working range of 450 mm×450 mm,which meets the requirements of the development of high-precision astronomical plate digitizer.The laser interferometry using optical square has the characteristics of simple layout of optical path and high measurement efficiency,which is suitable for daily measurement and calibration of the squareness of the air-bearing motion platform.

关 键 词：激光干涉仪 气浮运动平台 直线度 垂直度 

分 类 号：TH744.3[机械工程—光学工程] TH75[机械工程—仪器科学与技术]