关于多晶硅生产装置还原炉钟罩清洗机结构的研究  

Study on the Structure of a Reduction Furnace Bell Washer Used in Polysilicon Production Unit

作　　者：李春洋 王仕伍 何鹏飞 LI Chunyang;WANG Shiwu;HE Pengfei(Sichuan Yongxiang Co.,Ltd.,Leshan 614800,China)

机构地区：[1]四川永祥股份有限公司,四川乐山614800

出　　处：《山东化工》2025年第1期175-180,共6页Shandong Chemical Industry

摘　　要：为了进一步研究还原炉钟罩内壁清洗效果除与清洗工艺相关外,还与其他哪些重要因素有关,本次采用调整清洗机结构形式的方法对同材质、同操作条件、同清洗工艺下的同一台还原炉钟罩内壁的清洗效果进行对比研究,结果表明:同材质、同操作条件、同清洗工艺下的还原炉钟罩内壁清洗效果与清洗机结构也有重大关联。本次研究有助于提高还原炉钟罩内壁洁净度,提高多晶硅产品质量,降低清洗机人工维修工作负荷,提高清洗机结构的有效工作时间。In order to further study the cleaning effect of the inner wall of the reduction furnace bell jar,in addition to the cleaning process,what other important factors are related?The method of adjusting the structure form of the cleaning machine is used to compare the cleaning effect of the inner wall of the same reduction furnace bell jar under the same material,the same operating conditions and the same cleaning process.The results show that the cleaning effect of the inner wall of the reduction furnace bell jar under the same material,the same operating conditions and the same cleaning process is also significantly related to the structure of the cleaning machine.This research is helpful to improve the cleanliness of the inner wall of the reduction furnace bell jar,improve the quality of polysilicon products,reduce the manual maintenance load of the cleaning machine,and increase the effective working time of the cleaning machine structure.

关 键 词：多晶硅 还原炉钟罩 清洗机结构 

分 类 号：TQ054[化学工程]