316L不锈钢磁控溅射镀玫瑰金膜层及其耐磨性  

Wear resistance of rose gold film deposited on 316L stainless steel by magnetron sputtering

作　　者：孙子文 袁军平[1] 潘成强 赵雪阳 陈德东[1] 张劭烽 SUN Ziwen;YUAN Junping;PAN Chengqiang;ZHAO Xueyang;CHEN Dedong;ZHANG Shaofeng(Jewelry Institute,Guangzhou Panyu Polytechnic,Guangzhou 511483,China)

机构地区：[1]广州番禺职业技术学院珠宝学院,广东广州511483

出　　处：《电镀与涂饰》2025年第1期74-80,共7页Electroplating & Finishing

基　　金：广东省教育厅科研项目(2022ZDZX3062、2023KTSCX303);广州市教育局产学研结合项目(202235327)。

摘　　要：[目的]研究磁控溅射镀玫瑰金膜层的组成及耐磨性。[方法]以316L不锈钢为基材,采用磁控溅射技术在不同靶电流下制备玫瑰金膜层。通过扫描电子显微镜(SEM)、X射线衍射仪(XRD)和X射线光电子能谱仪(XPS)研究了膜层的表面形貌和组织结构,通过纳米压痕测试和摩擦磨损试验考察了膜层的显微硬度和耐磨性。[结果]随着靶电流从0.5 A增大到1.5 A,玫瑰金膜层的晶粒不断增大,显微硬度减小,耐磨性变差。不同靶电流下所得玫瑰金膜层均由Au^(0)、Cu^(0)和Au_(3)Cu构成,并且以Au_(3)Cu相的(111)和(222)晶面为主。[结论]本研究可为不锈钢表面磁控溅射镀玫瑰金工艺的实际应用提供参考。[Objective]The composition and wear resistance of rose gold film deposited by magnetron sputtering need to be studied.[Method]Rose gold films were deposited on the surface of 316L stainless steel by magnetron sputtering at different target currents.The surface morphology and microstructure of rose gold films were studied by scanning electron microscopy(SEM),X-ray diffraction(XRD),and X-ray photoelectron spectroscopy(XPS).The microhardness and wear resistance of rose gold films was examined through nanoindentation testing and friction and wear testing.[Result]With the increasing of target current from 0.5 A to 1.5 A,the deposited rose gold film showed continuous increase in grain size,a decrease in microhardness,and became worse in wear resistance.The rose gold films deposited at different target currents were all composed of Au^(0),Cu^(0),and Au_(3)Cu,and dominated by the(111)and(222)crystal planes of Au_(3)Cu phase.[Conclusion]This study provides theoretical data for practical application of magnetron sputtering rose gold films on the surface of stainless steel.

关 键 词：玫瑰金膜层 磁控溅射 组织结构 耐磨性 

分 类 号：TQ153.18[化学工程—电化学工业]