石英玻璃材料制备用等离子炬研究进展  

Research progress of plasma torch for preparation of quartz glass materials

作　　者：刘佳铭 刘波 马相国 王蕾 宋学富 孙元成 LIU Jiaming;LIU Bo;MA Xiangguo;WANG Lei;SONG Xuefu;SUN Yuancheng(China Building Materials Academy Co.,Ltd.,Beijing 100024)

机构地区：[1]中国建筑材料科学研究总院有限公司,北京100024

出　　处：《中国建材科技》2024年第6期58-64,共7页China Building Materials Science & Technology

摘　　要：高频等离子体化学气相沉积制备石英玻璃的过程中,电感耦合等离子炬的结构设计会影响等离子体火焰的气流场和温度场分布,从而影响高纯石英玻璃的物理性能和折射率均匀性等特性,因此等离子炬的合理设计及稳定性对于提高石英玻璃的产品质量具有重要作用。本文介绍了高频等离子体化学气相沉积制备石英玻璃的工艺,调研了国内外关于电感耦合等离子炬的研究现状,比较和分析了电感耦合等离子炬结构设计、数值模拟计算等方面的研究进展。In the process of synthesizing quartz glass by high frequency plasma chemical vapor deposition(PCVD),the structure design of inductively coupled plasma(ICP)torch will affect the distribution of gas flow field and temperature field of plasma flame,thus affecting the physical properties and refractive index uniformity of high purity quartz glass.Therefore,the reasonable design and stability of plasma torch play an important role in improving the product quality of quartz glass.In this paper,the preparation process of quartz glass by PCVD is introduced.The current research status of ICP torches at home and abroad is investigated.The research progress in structure design and numerical simulation of inductively ICP torches is compared and analyzed.

关 键 词：石英玻璃 等离子体化学气相沉积 电感耦合 等离子炬 

分 类 号：TB383[一般工业技术—材料科学与工程]