Zr-V-Fe吸气剂动态真空维持性能  

Dynamic Vacuum Maintenance Performance of Zr-V-Fe Getters

作　　者：唐丽军 王婧华 曹青 王旭迪[1] TANG Lijun;WANG Jinghua;CAO Qing;WANG Xudi(School of Mechanical Engineering,Hefei University of Technology,Hefei 230009,China;Zhejiang Institute of Optoelectronics,Jinhua 321004,China)

机构地区：[1]合肥工业大学机械工程学院,合肥230009 [2]浙江光电子研究院,金华321004

出　　处：《真空科学与技术学报》2025年第1期1-7,共7页Chinese Journal of Vacuum Science and Technology

基　　金：国家重点研发计划项目(2023YFC2205702);国家自然科学基金面上项目(62271187);国家自然科学基金青年基金项目(62101172);中央高校基本科研业务经费项目(JZ2024HGTG0307)。

摘　　要：吸气剂是密闭空间真空长寿命维持的关键,当环境条件发生改变时会导致吸气材料吸放气特性剧烈变化,进而影响真空度,因此研究温度影响下的吸气剂动态真空维持特性具有重要意义。文章利用差压法系统在密闭空间中对不同吸气饱和度的Zr-V-Fe吸气剂进行加热,研究吸气饱和度和温度对密闭空间真空动态演化性能的影响。实验结果表明,在温度升高情况下,吸气剂能够在较长时间内有效维持腔室内真空度。吸气剂饱和度越高,可吸收气体的内部空间越小,则真空维持性能越差;在一定临界温度下,较高的温度会加快气体的扩散速率,提高吸气剂的吸气性能,从而提升维持性能。本研究有助于深入理解吸气剂的真空维持性能,对无源真空系统优化设计和性能提升提供理论和实验依据。The getter is crucial for the long-term maintenance of vacuum in sealed spaces.Changes in environmental conditions can cause significant variations in the adsorption and desorption characteristics of the getter material,affecting the vacuum level.Therefore,studying the dynamic vacuum maintenance characteristics of getters under varying temperatures is of significant importance.This paper uses a differential pressure method to heat Zr-V-Fe getters with different saturation levels in a sealed space to investigate the effects of getters’saturation and temperature on the dynamic vacuum performance of the sealed space.The experimental results indicate that the getter can effectively maintain the chamber’s vacuum for an extended period under increasing temperatures.The higher the getter’s saturation level,the smaller the internal space available for gas absorption,leading to worse vacuum maintenance performance.Under a certain critical temperature,higher temperatures accelerate gas diffusion rates,enhancing the getter’s adsorption performance and improving maintenance capability.This study contributes to a deeper understanding of getters’vacuum maintenance performance and provides theoretical and experimental support for optimizing and enhancing passive vacuum systems.

关 键 词：非蒸散型吸气剂 差压法 真空维持性能 吸气性能测试 

分 类 号：TB79[一般工业技术—真空技术]