径向涡轮分子泵叶片结构优化及仿真分析  

Structural Optimization and Simulation Analysis of Radial Turbomolecular Pump Blade

作　　者：谢元华[1] 佟英博 谢天意 王桂鹏 窦仁超[2] 孟冬辉[2] 刘坤[1] 孙立臣[2] 闫荣鑫[2] XIE Yuanhua;TONG Yingbo;XIE Tianyi;WANG Guipeng;DOU Renchao;MENG Donghui;LIU Kun;SUN Lichen;YAN Rongxin(School of Mechanical Engineering and Automation,Northeastern University,Shenyang 110819,China;Beijing Institute of Spacecraft Environment Engineering,Beijing 100094,China)

机构地区：[1]东北大学机械工程与自动化学院,沈阳110819 [2]北京卫星环境工程研究所,北京100094

出　　处：《真空科学与技术学报》2025年第1期36-42,共7页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金项目(U22A20179);北京卫星环境工程研究所创新基金项目(CAST-BISEE 2019-024)。

摘　　要：涡轮分子泵广泛应用于大科学装置、核物理工业、半导体及薄膜工业。径向涡轮分子泵转子叶列结构简单,叶列排气端呈圆弧形外扩排布,有利于叶片间气体粒子正向传输,提升了抽气效率。文章以径向结构涡轮分子泵为研究对象,基于稀薄气体传输理论,采用数学粒子追踪方法,对9种不同形状的叶片结构进行对比分析,使用COMSOL软件模拟不同叶片结构下叶列间气体粒子的正、反向传输几率,探究叶片形状对气体粒子正、反向传输几率和压缩比的影响。结果表明,涡轮分子泵转子叶片一侧为弧形凸面结构,另一侧为平面结构时,分子泵的压缩比提升1个数量级,分子泵性能显著提升。研究对涡轮分子泵的设计与优化具有一定的参考价值和指导意义。Turbomolecular pumps are widely used in large scale scientific facilities,nuclear physics industry,semiconductors and thin film industry.The radial turbomolecular pump rotor blade array structure is simple,the exhaust end of the blade array is arc-shaped,which is conducive to the forward transmission of gas particles between blades and improves the pumping efficiency.Based on the rarefied gas transport theory and the mathematical particle tracing method,nine different blade structures are compared and analyzed in this paper.COMSOL software is used to simulate the forward and backward transmission probabilities of gas particles between blade rows under different blade structures,and the influence of blade shapes on the forward and backward transmission probabilities of gas particles is explored.The results show that the compression ratio of the turbomolecular pump is increased by one order of magnitude when one side of the rotor blade is convex and the other side is plane.This study has certain reference values and guidance for the design and optimization of turbomolecular pumps.

关 键 词：涡轮分子泵 径向 叶片形状 传输几率 压缩比 

分 类 号：TB752.27[一般工业技术—真空技术]