MEMS悬空结构上纳米材料的EHD打印工艺优化研究  

Research on Optimization of EHD Printing Process for Nanomaterials on Suspended MEMS Structures

作　　者：林鑫烨 刘亚东 姚冠宇 吴昊[1] 唐祯安[1] 余隽[1] LIN Xinye;LIU Yadong;YAO Guanyu;WU Hao;TANG Zhen an;YU Jun(School of Biomedical Engineering,Dalian University of Technology,Liaoning Key Laboratory of Integrated Circuit and Biomedical Electronic System)

机构地区：[1]大连理工大学生物医学工程学院、辽宁省集成电路与生物医学电子系统重点实验室

出　　处：《仪表技术与传感器》2025年第1期14-19,共6页Instrument Technique and Sensor

基　　金：国家自然科学基金项目(61874018);中央高校基本科研业务费专项资金资助项目(DUT22YG105)。

摘　　要：电流体动力学(EHD)打印具有非接触、精度高和材料选择灵活等优点,可应用于MEMS悬空结构上沉积各种纳米材料从而实现传感器微型化。以悬空微热板上打印气敏薄膜为研究对象,采用高速摄像机对EHD打印进行实验观测,结合有限元仿真进行墨水受力分析,研究了微滴和锥射流2种稳定的EHD打印模式的形成过程,通过将悬空的MEMS桥式结构纳入EHD打印仿真模型中,分析了MEMS悬空结构对EHD打印效果的影响。根据研究结果优化打印工艺参数,实现了SnO 2纳米气敏材料在微热板阵列上的批量化EHD打印,打印稳定性好,纳米材料分布均匀。Electrohydrodynamic(EHD)printing,with its advantages of non-contact,high precision,and flexible material selection,can deposit various nanomaterials onto suspended MEMS structures for sensor miniaturization.Using high-speed cameras,experimental observations were conducted on the printing of gas-sensitive films on suspended micro-hotplates.Ink force analysis was performed through finite element simulations to study the formation processes of two stable EHD printing modes including micro-droplet and cone-jet.The suspended MEMS bridge structure was integrated into the EHD printing simulation model to analyze its impact on printing effectiveness.Based on the findings,printing process parameters were optimized,enabling batch EHD prin-ting of SnO 2 nano gas-sensitive materials on micro-hotplate arrays with excellent stability and uniform material distribution.

关 键 词：电流体动力学打印 纳米材料 微机电系统 悬空结构 有限元仿真 

分 类 号：TH164[机械工程—机械制造及自动化] O361[理学—流体力学] TP212[理学—力学]