薄膜型压电复合驱动器输出特性研究  

Research on Output Characteristics of Thin Film Piezoelectric Composite Drivers

作　　者：王兴 邹赫麟 WANG Xing;ZOU Helin(Department of Electromechanical and Vehicle Engineering,Taiyuan University;Dalian University of Technology,Key Laboratory for Micro/Nano Technology and Systems of Liaoning Province)

机构地区：[1]太原学院机电与车辆工程系 [2]大连理工大学,辽宁省微纳米技术及系统重点实验室

出　　处：《仪表技术与传感器》2025年第1期45-50,共6页Instrument Technique and Sensor

基　　金：山西省科技厅基础研究计划青年基金(202203021212017);太原学院引进人才科研启动项目(24TYKY223);国家自然科学基金(51775088)。

摘　　要：针对压电驱动结构输出振幅小的问题,基于压电方程与力学理论,构建了“弹簧结构”压电驱动器输出振幅解析模型,研究了复合基板厚度h与压电薄膜厚度h p对输出振幅的影响规律。理论研究表明:h<0.8h p时,驱动器输出振幅随复合基板厚度增大而逐渐增大;h接近h_(p)时,输出振幅急剧增大;h>h_(p)时,振幅随复合基板厚度增大而逐渐减小。通过MEMS工艺制作了压电复合驱动器,LDV测试表明:当驱动电压与压电薄膜厚度大小不变时,驱动器输出振幅随复合基板厚度的增大先增大后减小,当复合基板与压电薄膜厚度接近时,中性面位于薄膜与复合基板接触面,输出振幅显著提升,与理论预测结果具有较好的一致性。该研究为压电复合驱动器的设计与优化提供新的工艺方法。Because of the small output amplitude of piezoelectric vibration structure,an output amplitude analytical model of a piezoelectric vibration plate with spring structure was constructed based on piezoelectric equations and mechanical theory.The influence of composite substrate thickness h and piezoelectric thin film thickness h p on output amplitude was studied.Theoretical analysis shows that when h<0.8h p,the output amplitude of the vibration plate gradually increased with the thickness of the composite substrate.When h approached h p,the output amplitude increased sharply;When h>h p,the amplitude gradually decreased as the thickness of the composite substrate increased.A piezoelectric composite vibration plate was fabricated using MEMS technology.LDV testing shows that when the driving voltage and the thickness of the piezoelectric film remain constant,the output amplitude of the vibration plate increases first and then decreases with the increase of the composite substrate thickness.When the thickness of the composite substrate and the piezoelectric film are closed,the neutral plane is located at the contact surface between the film and the composite substrate,and the output amplitude significantly increases,which was consistent with the theoretical prediction results.This present study provides new process methods for the design and optimization of piezoelectric composite vibration plates.

关 键 词：驱动器 压电薄膜 理论模型 振幅 振动测试 复合基板 

分 类 号：TP242[自动化与计算机技术—检测技术与自动化装置]