激光扫描横向差动共焦显微系统研制  

Development of Laser Scanning Lateral Differential Confocal Microscopic System

作　　者：于森 王振儒 邱丽荣[1] 崔健 赵维谦[1] Yu Sen;Wang Zhenru;Qiu Lirong;Cui Jian;Zhao Weiqian(MIIT Key Laboratory of Complex-field Intelligent Exploration,School of Optics and Photonics,Beijing Institute of Technology,Beijing 100081,China)

机构地区：[1]北京理工大学光电学院“复杂环境智能感测技术”工信部重点实验室,北京100081

出　　处：《光学学报》2024年第22期120-130,共11页Acta Optica Sinica

摘　　要：针对微细结构样品表面形貌的高速高精度测量难题,研制了一套激光扫描横向差动共焦显微系统。该系统通过在共焦系统收集光路插入D型光阑,使被测样品表面高度发生变化引起探测光斑横向移动,在探测焦平面进行分割焦斑探测,获得高灵敏横向差动共焦响应信号,实现高分辨测量;同时利用轴向响应信号过零点附近高线性特点,实现轴向无扫描高速测量,配合二维振镜进行高速光束横向扫描,最终实现高速高分辨三维显微成像。实验表明,该系统可以实现轴向分辨力达1 nm的三维显微成像,并且与奥林巴斯激光扫描共聚焦显微镜测量结果比较,测量效率提高约3倍,为超精密加工和测量领域的高速高精度微细结构显微成像提供了一种新的有效的工程化测量仪器。Objective With the rapid development of ultra-precision manufacturing,various precision components with micro and nanostructures are widely employed in fields such as engineering materials,biomedicine,optical imaging,and semiconductor manufacturing.Meanwhile,they are developing toward high-performance manufacturing with increasing scale,increasingly fine structures,and increasingly complex structural shapes.Testing techniques and processing techniques complement each other to truly reflect the processing quality of ultra-precision manufacturing devices and study device functions,which is an essential part of the development of ultra-precision manufacturing technology.A laser scanning lateral differential confocal microscope is developed in our study to tackle the challenge of high-speed and highprecision measurement of complex surface morphology of microstructured samples.Methods Firstly,the emitted laser enters the galvanometer beam scanning module after passing through the splitter prism.The laser emitted from the galvanometer beam scanning module focuses on its focal plane by the scan lens,and the rear focal plane of the scan lens coincides with the rear focal plane of the tube lens.After being collimated by the tube lens,it enters the measurement objective.Finally,the measured objective converges the laser beam on the surface of the sample.By changing the control signal,the laser exits from the two-dimensional galvanometer in different directions,causing the parallel light direction to enter the measurement objective to change accordingly.This changes the lateral position of the light spot that converges on the surface of the sample,forming the measurement beam.Even if the sample is not moved,the laser spot and the measured sample can still be changed by controlling the reflection angle of the galvanometer scanning module.Additionally,the relative position is adjusted to achieve beam scanning.The light beam reflected by the tested sample returns to the original path and passes through the measurement objectiv

关 键 词：光学仪器 三维显微成像 横向差动共焦显微术 振镜扫描 高速高分辨 

分 类 号：TH742[机械工程—光学工程]