基于异质多维集成的微型三分量磁通门传感器  

A Micro Triaxial Fluxgate Sensors Based on Heterogeneous Multidimensional Integration

作　　者：戴毓含 马权坤 邱翔 吴涛 孙学成 雷冲 DAI Yuhan;MA Quankun;QIU Xiang;WU Tao;SUN Xuecheng;LEI Chong(National Key Laboratory of Advanced Micro and Nano Manufacture Technology,Department of Micro/Nano Electronics,School of Electronic Information and Electrical Engineering,Shanghai Jiao Tong University,Shanghai 200240,China;Research and Development Center of Microelectronics,School of Mechatronic Engineering and Automation,Shanghai University,Shanghai 200444,China;Key Laboratory of Advanced Display and System Applications of Ministry of Education,Shanghai 200072,China;Guizhou Aerospace Institute of Measuring and Testing Technology,Guiyang 550009,China;Key Laboratory of Submarine Geosciences,Second Institute of Oceanography,Ministry of Natural Resources,Hangzhou 310012,China)

机构地区：[1]上海交通大学电子信息与电气工程学院微纳电子学系微米纳米加工技术全国重点实验室,上海200240 [2]上海大学机电工程与自动化学院微电子研发中心,上海200444 [3]教育部高级显示与系统应用重点实验室,上海200072 [4]贵州航天测控技术研究所,贵州贵阳550009 [5]自然资源部第二海洋研究所海底地球科学重点实验室,浙江杭州310012

出　　处：《数字海洋与水下攻防》2024年第6期580-587,共8页Digital Ocean & Underwater Warfare

基　　金：国家重大科研仪器研制专项项目“深海热液系统孔域原位多参数探测-观测装置”(42127807-03);国家重点研发计划项目“深海硫化物资源移动式高效钻测技术与示范”(2023YFC2811100,2023YFC2811104);国家自然科学基金“基于巨磁阻效应(GMR)的磁生物传感器芯片对前列腺癌化过程中外泌体的特异性蛋白表达量的相关性研究”(52107239);上海交通大学“深蓝计划”基金重点项目(SL2022ZD202);上海交通大学医工交叉研究基金(YG2023QNA40);上海市科委专业技术服务平台资助项目(19DZ2291103);上海高校青年东方学者岗位计划(QD2020009)。

摘　　要：采用异质多维集成技术,开发了一种T型微型三分量磁通门传感器。该传感器集成了基于微机电系统(MEMS)技术制造的具有钴基非晶带芯和螺线管励磁检测线圈的单轴螺线管磁通门芯片,通过PCB基板的正交连接以及单轴磁通门芯片与基板的键合,实现了三分量的全集成。测试结果显示:传感器在X、Y、Z方向上的灵敏度分别为1068 V/T、1072 V/T和1069 V/T,噪声功率谱密度分别为0.069 nT√Hz@1 Hz、0.136 nT√Hz@1 Hz和0.102 nT√Hz@1 Hz,时间漂移峰值分别为7.5 nT、23.5 nT、17.8 nT,线性响应范围为0~100μT。正交度测试表明:该传感器X-Y、X-Z、Y-Z轴之间的正交偏差分别为0.5°、1°、0.5°,可以满足对地磁场三分量的有效测量。采用更精密的基板加工技术和更精准的键合对准符号图案可以进一步提高异质集成三分量磁通门传感器的正交度。这项研究为微型高精度磁场传感应用提供了重要的技术支持。In this paper,a T-shaped micro triaxial fluxgate sensor is developed using heterogeneous multidimensional integration technology.The sensor integrates a uniaxial solenoid fluxgate chip fabricated using Micro-Electro-Mechanical Systems(MEMS)technology,which features a cobalt-based amorphous band core and an excitation detection coil.By orthogonally connecting through a PCB substrate and bonding the uniaxial fluxgate chip to the substrate,a fully integrated triaxial configuration is achieved.Test results show that the sensor's sensitivities are 1068 V/T for the X axis,1072 V/T for the Y axis,and 1069 V/T for the Z axis.The corresponding noise power spectral densities are 0.069 nT√Hz,0.136 nT√Hz,and 0.102 nT√Hz at 1 Hz for each respective axis.Time drift peaks are recorded at 7.5 nT for X,23.5 nT for Y,and 17.8 nT for Z,with a linear response range from 0 to 100μT.Orthogonality tests reveal deviations of 0.5°between X and Y,1°between X and Z,and 0.5°between Y and Z,meeting the standards for precise measurement of the geomagnetic field's three components.Further improvements in the orthogonality of the heterogeneously integrated triaxial magnetic sensor can be achieved through more precise substrate machining and more accurate bonding alignment symbols.This research provides significant technical support for applications requiring small,high-precision magnetic field sensors.

关 键 词：MEMS 异质多维集成 三分量 磁通门传感器 

分 类 号：TN929.3[电子电信—通信与信息系统]