大行程-高频响压电驱动纳米定位平台优化设计  

Optimized Design of a Large Stroke-High Frequency Piezoelectric Driven Nanopositioning Platform

作　　者：张萌 刘时成 张松林 朱禹清 吴垚[1] ZHANG Meng;LIU Shicheng;ZHANG Songlin;ZHU Yuqing;WU Yao(College of Mechanical and Electrical Engineering,Shaanxi University of Science&Technology,Xi’an 710021,China)

机构地区：[1]陕西科技大学机电工程学院,陕西西安710021

出　　处：《压电与声光》2024年第6期934-941,共8页Piezoelectrics & Acoustooptics

基　　金：陕西省自然科学基金(2023-JC-QN-0408);陕西高校青年创新团队(2024);陕西省教育厅专项科研计划项目(23JK0348);西安市科技计划高校院所科技人员服务企业项目(2023JH-GXRC-0160)。

摘　　要：针对原子力显微镜的扫描范围和扫描速度受限于柔性机构的工作行程和固有频率,而柔性机构在设计时难以兼顾大工作行程和高固有频率的问题,基于桥式放大机构设计了一款纳米定位平台,并对其构型和主要参数进行优化。首先研究了柔性臂数量和厚度对桥式机构固有频率及放大比的影响,建立了新型双桥式柔性放大机构构型;然后基于矩阵位移法实现了纳米定位平台离散化,构建纳米定位平台整体刚度矩阵及系统的力学模型;最后针对纳米定位平台的频响和行程对柔性放大机构的主要参数进行优化分析与仿真分析。仿真结果表明,优化后的压电驱动纳米定位平台的一阶固有频率为4.4 kHz,工作行程超过30μm×30μm。The scanning range and scanning speed of the atomic force microscope are limited by the size of the working stroke and intrinsic frequency of the flexible mechanism;however,it is challenging for the flexible mechanism to account for the large working stroke and high intrinsic frequency in the design to solve the problem.This study proposes a nanopositioning platform based on the bridge-type amplification mechanism and optimizes its configuration and main parameters.First,a new type of double-bridge flexible amplification mechanism is established through the study of the influence of the number and thickness of flexible arms on the intrinsic frequency and amplification ratio of the bridge mechanism.Subsequently,the discretization of the nanopositioning platform is realized based on the matrix displacement method,and the overall stiffness matrix of the nanopositioning platform and the mechanical model of the system are constructed.Finally,the optimization of the main parameters of the flexible amplification mechanism is carried out with respect to the frequency response and the stroke of the nanopositioning platform,and simulation analysis is performed.Finally,the main parameters of the flexible amplification mechanism are optimized for the frequency response and travel of the nanopositioning platform and simulated.The simulation results show that the optimized piezoelectric-driven nanopositioning platform has a first-order intrinsic frequency of 4.4 kHz and a working travel of more than 30μm×30μm.

关 键 词：纳米定位平台 压电驱动器 柔性放大机构 矩阵位移法 有限元仿真 

分 类 号：TN384[电子电信—物理电子学] TH742[机械工程—光学工程]