半导体加工设备主动隔振仿真和实验研究  

Research on Simulation and Experiment of Active Vibration Isolation of Semiconductor Processing Equipment

作　　者：王三霞 柳滨[2] 张乾[2] 王俊杰 刘帅[3] Wang Sanxia;Liu Bin;Zhang Qian;Wang Junjie;Liu Shuai(School of Software,Shandong University,Jinan 250100,China;The 45th Research Institute of CETC,Beijing 100176,China;School of Control Science and Engineering,Shandong University,Jinan 250061,China)

机构地区：[1]山东大学软件学院,济南250100 [2]中国电子科技集团公司第四十五研究所,北京100176 [3]山东大学控制科学与工程学院,济南250061

出　　处：《动力学与控制学报》2024年第12期54-60,共7页Journal of Dynamics and Control

摘　　要：针对半导体加工设备设计了一种主动隔振策略.分析了隔振机构的内部垂向参数特性并建立了隔振机构动力学模型.由于半导体加工设备的隔振装置由基座、隔振机构和由隔振机构支撑的各个部件组成,因此隔振机构动力学模型将基座、隔振机构、支撑组件看作二级隔振系统来模拟隔振装置.为隔振机构设计了自抗扰控制和绝对速度反馈控制联合的控制算法.搭建了基于半导体加工设备用隔振机构和控制算法的仿真模型,给出了传递率和顺应度两个重要指标.最后通过实验验证主动隔振策略的性能.对比隔振率和顺应度两个指标,证明了设计的控制算法效果优于常用控制算法.An active vibration isolation strategy is designed for semiconductor machining equipment.The internal parameter characteristics of the vibration isolation mechanism are analyzed and a dynamic model of the vibration isolation mechanism is established.Due to the fact that the isolation device of semiconductor processing equipment consists of a baseframe,vibration isolation mechanism,and various components supported by the vibration isolation mechanism,the dynamic model of the isolation mechanism considers the baseframe,vibration isolation mechanism,and support components as a secondary isolation system to simulate the isolation device.A control algorithm combining active disturbance rejection control and absolute velocity feedback control are designed for the vibration isolation mechanism.A simulation model based on the vibration isolation mechanism and control algorithm for semiconductor processing equipment is built,and two important indicators,transmissibility and compliance,are given Finally,the performance of the active vibration isolation strategy is verified through experiments.According to the two indicators of transmissibility and compliance,it is proven that the designed control algorithm performs better than commonly used control algorithms.

关 键 词：半导体加工设备 主动隔振 自抗扰控制 绝对速度反馈 传递率 顺应度 

分 类 号：TB53[理学—物理]