用于MEMS微镜激光跟瞄的扩角镜头研究  

Research on the wide-angle optical lens for MEMS micromirror laser tracking and aiming

作　　者：张鹏程 汪洋[1,2] 李安娜 黄昊 张程 张家昌 张永贵 王栎皓 刘艺晨 武震宇 ZHANG Pengcheng;WANG Yang;LI Anna;HUANG Hao;ZHANG Cheng;ZHANG Jiachang;ZHANG Yonggui;WANG Lihao;LIU Yichen;WU Zhenyu(State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China;University of Chinese Academy of Sciences,Beijing 100049,China;Shanghai MExpert Technology Co.,Ltd,Shanghai 201899,China;Shanghai Industrial Technology Research Institute,Shanghai 201800,China)

机构地区：[1]中国科学院上海微系统与信息技术研究所传感技术国家重点实验室,上海200050 [2]中国科学院大学,北京100049 [3]上海麦锴科技有限公司,上海201899 [4]上海微技术工业研究院,上海201800

出　　处：《红外与激光工程》2025年第1期120-130,共11页Infrared and Laser Engineering

基　　金：国家重点研发计划项目(2021YFB3202500);上海市“科技创新行动计划”启明星项目(23YF1445100)。

摘　　要：MEMS微镜是小型化激光跟瞄系统的关键组件。系统通过控制MEMS微镜使激光偏转,并由光电探测器收集信号,可以实现对目标的稳定跟踪和瞄准。然而MEMS准静态微镜的扫描视场角较小,这限制了对目标的大视场跟踪能力。为了解决MEMS微镜扫描视场较小的问题,基于伽利略扩角光路,针对小型化、后扫描光路、易加工等需求,设计了一款小型化跟瞄扩角镜头。首先,采用光束发散角和高斯拟合误差等指标,结合光束质量分析仪,对比了激光在扩角前后的光束质量,分析了扩角镜头对光束质量的影响;其次,基于搭建的扩角镜头表征装置,对比理论计算与仿真模型,分析了扩角结果;最后,结合MEMS准静态微镜和扩角镜头,对比了扩角前后的激光扫描图案。实验结果表明:设计的扩角镜头具有约2.88倍的扩角放大率,扩角线性度小于0.7%,且扩角前后激光光束质量无明显变化,扩角后发散全角控制在2 mrad以内。该项研究成果有助于推动小型化MEMS微镜激光跟踪瞄准系统的性能提升。Objective In MEMS laser tracking and aiming systems,MEMS micro-mirrors are identified as the key components. These micro-mirrors enable the systems to achieve stable tracking and aiming of targets throughtheir control of laser deflection and the signal acquisition by photoelectric detectors. However, the pursuit ofhigher response speeds and sizes of larger mirror in the design process has led to a compromise in the scanningfield of view, which does not meet the requirements for large field of view tracking and aiming of targets. Toaddress the issue of the limited scanning field of view of MEMS micro-mirrors, this paper has conducted researchon the wide-angle optics and has designed a wide-angle lens suitable for tracking and aiming systems.Methods Utilizing Zemax optical simulation software, a wide-angle lens was designed, which composed of abi-convex lens and two bi-concave lenses along with its mounting sleeve and clamp rings (Fig.6). The wide-anglelens was evaluated using indicators such as the beam divergence angle and the Gaussian fitting error of the lightintensity distribution. A beam quality analyzer was employed to compare the beam quality before and afterexpansion, thereby analyzing the impact of the expanded field of view lens on the beam quality. An experimentalcharacterization device was set up to characterize the expansion magnification rate of the wide-angle lens (Fig.8).By altering the control current of the voice coil motor's fast reflection mirror, the laser deflection angle before andafter the addition of the wide-angle lens was compared to analyze the expansion results. A MEMS quasi-staticmicro-mirror was used to control the deflection of a 638 nm laser, and a practical application demonstrationdevice was set up to compare the laser scanning patterns before and after expansion (Fig.9). This included linescanning patterns and Lissajous scanning patterns.Results and Discussions The experimental results indicate that the designed wide-angle lens possess anexpansion magnification rate of approxima

关 键 词：压电微镜 微机电系统技术 激光跟踪瞄准 扩角镜头 伽利略光路 

分 类 号：O439[机械工程—光学工程] E933.43[理学—光学]