基于扫描热探针技术的二维材料物性调控研究进展  

Research progress of regulation of physical properties of two-dimensional materials based on thermal scanning probe lithography

作　　者：赵世杰[1] 马浩南 刘霞[1] ZHAO Shijie;MA Haonan;LIU Xia(School of Integrated Circuit and Electronics,Beijing Institute of Technology,Beijing 100081,China)

机构地区：[1]北京理工大学集成电路与电子学院,北京100081

出　　处：《物理学报》2025年第3期58-66,共9页Acta Physica Sinica

基　　金：国家重点研发计划(批准号:2023YFB3405600);国家自然科学基金(批准号:62274013)资助的课题。

摘　　要：随着微观领域探索的不断深入,以光刻和各类刻蚀工艺为代表的微纳加工技术已被广泛应用于微米及纳米尺度的结构与器件制造,推动了集成电路、微纳光电器件、微机电系统等领域的不断革新.这不仅带动了设备性能的提升,还为微观物性调控机制的基础科学研究带来了新的机遇.近年来,作为一种新兴的微纳加工技术,扫描热探针技术在二维材料加工、物性调控和纳米级灰度结构制造方面获得了实践应用,并展现出独特优势.本文将从扫描热探针技术的原理及特点出发,分析其在二维材料微纳加工及物性调控领域的最新研究进展,最后展望该技术的广阔应用前景.With the continuous development of micro-scale exploration,micro/nano fabrication technologies,represented by photolithography and various etching processes,have been widely used for fabricating microand nanoscale structures and devices.These developments have driven innovation in fields such as integrated circuits,micro-nano optoelectronic devices,and micro-electromechanical systems,while also bringing new opportunities to fundamental scientific research,including the study of microscopic property regulation mechanisms.In recent years,as an emerging micro-nano fabrication technology,thermal scanning probe lithography(t-SPL)has shown promise and unique advantages in applications related to the fabrication and property regulation of two-dimensional materials,as well as the creation of nanoscale grayscale structures.By employing the fabrication methods such as material removal and modification,t-SPL can be used as an advanced technology for regulating two-dimensional material properties,or directly effectively regulating various properties of two-dimensional materials,thereby significantly improving the performance of twodimensional material devices,or advancing fundamental scientific research on the micro/nano scale.This paper starts with the principles and characteristics of t-SPL,analyzes the recent research progress of the micro-nano fabrication and property modulation of two-dimensional materials,including several researches achieved by using t-SPL as the core fabrication methods,such as direct patterning,strain engineering,and reaction kinetics research of two-dimensional materials.Finally,the challenges in t-SPL technology are summarized,the corresponding possible solutions are proposed,and the promising applications of this technology are explored.

关 键 词：扫描热探针技术 二维材料 微纳加工 物性调控 

分 类 号：TB34[一般工业技术—材料科学与工程]