半导体工艺机台需求分析与施工管理研究  

Research on Demand Analysis and Construction Management of Semiconductor Process Equipment

作　　者：朱佳富 尹鹏飚 孙瑞 Zhu Jiafu;Yin Pengbiao;Sun Rui(China Electronics System Engineering No.2 Construction Co.,Ltd.,Wuxi,Jiangsu 214000)

机构地区：[1]中国电子系统工程第二建设有限公司,江苏无锡214000

出　　处：《现代工程科技》2025年第2期89-92,共4页Modern Engineering Technology

摘　　要：伴随着国内芯片产业需求的不断扩大,带动了国内半导体产业项目的蓬勃发展。二次配项目作为半导体厂房投产前的最后一道环节,其管理效率直接决定了项目能否按期投产,为此提高二次配管控效率尤为关键。通过采取列举法对芯片制造工艺、区域机台划分、机台数量配比等方面进行较为深入的解读与总结,分析各区域工艺流程与机台点位需求特征,加强对晶圆制造工艺的了解,以此提高二次配项目的管理效率。With the continuous expansion of the demand for the domestic chip industry,it has driven the vigorous development of domestic semiconductor industry projects.As the last link before the commissioning of a semiconductor factory,the management efficiency of the secondary distribution project directly determines whether the project can be put into production on schedule.Therefore,it is particularly crucial to improve the management and control efficiency of the secondary distribution.This paper conducts an in-depth interpretation and summary of chip manufacturing processes,regional equipment division,equipment quantity ratio,etc.through the enumeration method.By analyzing the process flow and equipment point demand characteristics of each region,it is expected that practitioners will strengthen their understanding of wafer manufacturing processes and improve the management efficiency of the secondary distribution.

关 键 词：半导体 芯片厂房 晶圆制造 施工管理 

分 类 号：TN305[电子电信—物理电子学]