高精度线位移传感器全自动校准装置  

Development of a fully automatic calibration device for high-precision linear displacement sensors

作　　者：马车 赵米锋 杨曦 朱锴 高锦东 杜龙 袁小淞 Ma Che;Zhao Mifeng;Yang Xi;Zhu Kai;Gao Jindong;Du Long;Yuan Xiaosong(Xi’an Aerospace Institute of Metrology&Measurement)

机构地区：[1]西安航天计量测试研究所

出　　处：《上海计量测试》2024年第6期49-51,56,共4页Shanghai Measurement and Testing

摘　　要：为提高线位移传感器校准工作的效率和校准的准确度,研制一台符合国家校准规范要求的,合理、准确、高效的线位移传感器全自动校准装置,采用激光干涉仪作为长度标准,利用闭环控制的方式驱动直线运动单元做定点往复运动,上位机自动记录和存储标准位移量和传感器输出量实现线位移传感器的全自动校准,最终的定位准确度控制在3μm以内,有效行程为2000 mm。In order to improve the accurate calibration and efficiency of the calibration work of linear displacement sensors,a reasonable,accurate,and efficient fully automatic calibration device for linear displacement sensors that meets the requirements of our national calibration standards is developed.A laser interferometer is used as the length reference,and the linear motion unit is driven to perform fixedpoint reciprocating motion in a closed-loop control manner.The upper computer automatically records and stores the standard displacement and sensor output to achieve fully automatic calibration of the linear displacement sensor.The final positioning accuracy is controlled within 3μm,and the effective stroke is 2000 mm.

关 键 词：线位移传感器 校准 自动化 激光干涉仪 

分 类 号：TP2[自动化与计算机技术—检测技术与自动化装置]